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Paper Abstract and Keywords
Presentation 2019-06-21 11:00
Depth Profiling of Nitrogen Atoms in No-annealed SiO2/4H-SiC Structures
Takuji Hosoi, Kidist Moges (Osaka Univ.), Mitsuru Sometani (AIST), Takayoshi Shimura (Osaka Univ.), Shinsuke Harada (AIST), Heiji Watanabe (Osaka Univ.) SDM2019-25
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
Keyword (in Japanese) (See Japanese page) 
(in English) / / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 119, no. 96, SDM2019-25, pp. 1-4, June 2019.
Paper # SDM2019-25 
Date of Issue 2019-06-14 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM  
Conference Date 2019-06-21 - 2019-06-21 
Place (in Japanese) (See Japanese page) 
Place (in English) Nagoya Univ. VBL3F 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Material Science and Process Technology for MOS Devices and Memories 
Paper Information
Registration To SDM 
Conference Code 2019-06-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Depth Profiling of Nitrogen Atoms in No-annealed SiO2/4H-SiC Structures 
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1st Author's Name Takuji Hosoi  
1st Author's Affiliation Osaka University (Osaka Univ.)
2nd Author's Name Kidist Moges  
2nd Author's Affiliation Osaka University (Osaka Univ.)
3rd Author's Name Mitsuru Sometani  
3rd Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
4th Author's Name Takayoshi Shimura  
4th Author's Affiliation Osaka University (Osaka Univ.)
5th Author's Name Shinsuke Harada  
5th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
6th Author's Name Heiji Watanabe  
6th Author's Affiliation Osaka University (Osaka Univ.)
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Speaker Author-1 
Date Time 2019-06-21 11:00:00 
Presentation Time 20 minutes 
Registration for SDM 
Paper # SDM2019-25 
Volume (vol) vol.119 
Number (no) no.96 
Page pp.1-4 
#Pages 4 
Date of Issue 2019-06-14 (SDM) 

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