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| Presentation | 2019-10-24 16:10 Observation of Fluctuation of Magnetron Sputtering Plasmas Using High-speed Video Camera Shintaro Yamazaki, Tetsuya Goto, Manabu Suzuki, Rihito Kuroda, Shigetoshi Sugawa (Tohoku Univ.)  SDM2019-67 Link to ES Tech. Rep. Archives: SDM2019-67 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | (Not available yet) | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 119, no. 239, SDM2019-67, pp. 69-72, Oct. 2019. | |
| Paper # | SDM2019-67 | |
| Date of Issue | 2019-10-16 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2019-67 Link to ES Tech. Rep. Archives: SDM2019-67 |
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| Conference Information | |
| Committee | SDM |
| Conference Date | 2019-10-23 - 2019-10-24 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Niche, Tohoku Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process Science and New Process Technology |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2019-10-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Observation of Fluctuation of Magnetron Sputtering Plasmas Using High-speed Video Camera |
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| 1st Author's Name | Shintaro Yamazaki |
| 1st Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 2nd Author's Name | Tetsuya Goto |
| 2nd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 3rd Author's Name | Manabu Suzuki |
| 3rd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 4th Author's Name | Rihito Kuroda |
| 4th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 5th Author's Name | Shigetoshi Sugawa |
| 5th Author's Affiliation | Tohoku University (Tohoku Univ.) |
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| Speaker | Author-1 |
| Date Time | 2019-10-24 16:10:00 |
| Presentation Time | 30 minutes |
| Registration for | SDM |
| Paper # | SDM2019-67 |
| Volume (vol) | vol.119 |
| Number (no) | no.239 |
| Page | pp.69-72 |
| #Pages | 4 |
| Date of Issue | 2019-10-16 (SDM) |
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