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Paper Abstract and Keywords
Presentation 2020-10-22 15:20
Lattice Matching and X-ray Structural Analysis of Ferroelectric Thin Film BiFeO3
Fuminobu Imaizumi, Rikuto Nakada (NIT, Oyama College) SDM2020-20
Abstract (in Japanese) (See Japanese page) 
(in English) With the increasing use of Internet of Things in various domains, which has led to an increase in the number of sensors being installed, it is indispensable to develop environment friendly sensor modules. Correspondingly, we investigated the formation of BiFeO3 films as a lead-free ferroelectric material on DyScO3 substrate. Experiments were performed to analyze the film formation process via the sputtering method, followed by heat treatment. Consequently, a BiFeO3 film was formed with a single (110) orientation, and two types of bonds (FeO and Fe2O3) were observed. Additionally, no issues related to adhesion or peeling were found. Thus, the developed BiFeO3 film can be potentially used as a ferroelectric material in various devices.
Keyword (in Japanese) (See Japanese page) 
(in English) Piezoelectric material / BiFeO3 thin film / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 120, no. 205, SDM2020-20, pp. 30-33, Oct. 2020.
Paper # SDM2020-20 
Date of Issue 2020-10-15 (SDM) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2020-20

Conference Information
Committee SDM  
Conference Date 2020-10-22 - 2020-10-22 
Place (in Japanese) (See Japanese page) 
Place (in English) Online 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Process Science and New Process Technology 
Paper Information
Registration To SDM 
Conference Code 2020-10-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Lattice Matching and X-ray Structural Analysis of Ferroelectric Thin Film BiFeO3 
Sub Title (in English)  
Keyword(1) Piezoelectric material  
Keyword(2) BiFeO3 thin film  
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1st Author's Name Fuminobu Imaizumi  
1st Author's Affiliation National Institute of Technologoy, Oyama College (NIT, Oyama College)
2nd Author's Name Rikuto Nakada  
2nd Author's Affiliation National Institute of Technologoy, Oyama College (NIT, Oyama College)
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Speaker Author-1 
Date Time 2020-10-22 15:20:00 
Presentation Time 30 minutes 
Registration for SDM 
Paper # SDM2020-20 
Volume (vol) vol.120 
Number (no) no.205 
Page pp.30-33 
#Pages 4 
Date of Issue 2020-10-15 (SDM) 

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