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Paper Abstract and Keywords
Presentation 2021-04-23 15:10
[Invited Talk] Transistor application of polycrystalline Ge-based thin films
Kaoru Toko (Univ. of Tsukuba) SDM2021-4 OME2021-4
Abstract (in Japanese) (See Japanese page) 
(in English) With the development of Ge device technologies, a polycrystalline Ge thin-film transistor (TFT) is attracting a great deal of attention to improve the performance of Si large-scale integrated circuits and mobile terminals. Here, accumulation mode TFTs are fabricated at low temperature (< 500 °C) based on high-mobility polycrystalline Ge layers formed by advanced solid-phase crystallization. The relationship between the crystal quality, electrical properties, and TFT characteristics is comprehensively discussed with the prospect of application to flexible TFTs.
Keyword (in Japanese) (See Japanese page) 
(in English) germanium / polycrystalline / thin film transistor / solid-phase crystallization / / / /  
Reference Info. IEICE Tech. Rep., vol. 121, no. 8, SDM2021-4, pp. 15-18, April 2021.
Paper # SDM2021-4 
Date of Issue 2021-04-16 (SDM, OME) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2021-4 OME2021-4

Conference Information
Committee SDM OME  
Conference Date 2021-04-23 - 2021-04-24 
Place (in Japanese) (See Japanese page) 
Place (in English) Okinawaken Seinen Kaikan 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Thin film devices (Si, compound, organic, flexible), Biotechnology, Materials, Characterization, etc. 
Paper Information
Registration To SDM 
Conference Code 2021-04-SDM-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Transistor application of polycrystalline Ge-based thin films 
Sub Title (in English)  
Keyword(1) germanium  
Keyword(2) polycrystalline  
Keyword(3) thin film transistor  
Keyword(4) solid-phase crystallization  
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1st Author's Name Kaoru Toko  
1st Author's Affiliation University of Tsukuba (Univ. of Tsukuba)
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Speaker Author-1 
Date Time 2021-04-23 15:10:00 
Presentation Time 30 minutes 
Registration for SDM 
Paper # SDM2021-4, OME2021-4 
Volume (vol) vol.121 
Number (no) no.8(SDM), no.9(OME) 
Page pp.15-18 
#Pages 4 
Date of Issue 2021-04-16 (SDM, OME) 

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