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Paper Abstract and Keywords
Presentation 2022-01-31 15:00
[Invited Talk] ****
Kei Sumita, Chia-Tsong Chen, Kasidit Toprasertpong, Mitsuru Takenaka, Shinich Takagi (Univ.of Tokyo) SDM2021-71 Link to ES Tech. Rep. Archives: SDM2021-71
Abstract (in Japanese) (See Japanese page) 
(in English) Mobility reduction due to surface roughness scattering is a critical concern for Extremely-Thin-Body (ETB) nanosheet channels. However, the conventional scattering model cannot explain the experimental results with realistic roughness. In this study, we have proposed a new model of surface roughness scattering, which can explain the experimental mobility of SOI, GOI and InAs-OI nMOSFETs with roughness parameters obtained experimentally from TEM images. Based on this model, we deliver the assessment on the optimum ETB channels down to 2 nm. As a result, the anisotropic valley with heavy confinement mass is expected to have the high immunity to mobility reduction by surface roughness. In particular, (111) GOI is most expected thanks to the strong anisotropy of the L valley and have the excellent surface-roughness-limited electron mobility even in the 2-nm-thick channels, which is an advantage over 2D materials.
Keyword (in Japanese) (See Japanese page) 
(in English) Extremely-Thin-Body / Nanosheet / MOSFET / Surface Roughness Scattering / Mobility / / /  
Reference Info. IEICE Tech. Rep., vol. 121, no. 365, SDM2021-71, pp. 12-15, Jan. 2022.
Paper # SDM2021-71 
Date of Issue 2022-01-24 (SDM) 
ISSN Online edition: ISSN 2432-6380
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Conference Information
Committee SDM  
Conference Date 2022-01-31 - 2022-01-31 
Place (in Japanese) (See Japanese page) 
Place (in English) Online 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To SDM 
Conference Code 2022-01-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) **** 
Sub Title (in English)  
Keyword(1) Extremely-Thin-Body  
Keyword(2) Nanosheet  
Keyword(3) MOSFET  
Keyword(4) Surface Roughness Scattering  
Keyword(5) Mobility  
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1st Author's Name Kei Sumita  
1st Author's Affiliation University of Tokyo (Univ.of Tokyo)
2nd Author's Name Chia-Tsong Chen  
2nd Author's Affiliation University of Tokyo (Univ.of Tokyo)
3rd Author's Name Kasidit Toprasertpong  
3rd Author's Affiliation University of Tokyo (Univ.of Tokyo)
4th Author's Name Mitsuru Takenaka  
4th Author's Affiliation University of Tokyo (Univ.of Tokyo)
5th Author's Name Shinich Takagi  
5th Author's Affiliation University of Tokyo (Univ.of Tokyo)
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Speaker Author-1 
Date Time 2022-01-31 15:00:00 
Presentation Time 30 minutes 
Registration for SDM 
Paper # SDM2021-71 
Volume (vol) vol.121 
Number (no) no.365 
Page pp.12-15 
#Pages
Date of Issue 2022-01-24 (SDM) 


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