Paper Abstract and Keywords |
Presentation |
2022-07-29 13:30
A Study Ion Implanter Monitoring Based on Decision Trees/Forests Yu-Ling Lin (UoA), Shih-Cheng Horng (CYUT), Qiangfu Zhao (UoA) R2022-9 |
Abstract |
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Reference Info. |
IEICE Tech. Rep., vol. 122, no. 140, R2022-9, pp. 1-6, July 2022. |
Paper # |
R2022-9 |
Date of Issue |
2022-07-22 (R) |
ISSN |
Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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R2022-9 |
Conference Information |
Committee |
R |
Conference Date |
2022-07-29 - 2022-07-29 |
Place (in Japanese) |
(See Japanese page) |
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Topics (in Japanese) |
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Topics (in English) |
Reliability Theory, Communication Network Reliability, Reliability General |
Paper Information |
Registration To |
R |
Conference Code |
2022-07-R |
Language |
English |
Title (in Japanese) |
(See Japanese page) |
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Title (in English) |
A Study Ion Implanter Monitoring Based on Decision Trees/Forests |
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1st Author's Name |
Yu-Ling Lin |
1st Author's Affiliation |
The University of Aizu (UoA) |
2nd Author's Name |
Shih-Cheng Horng |
2nd Author's Affiliation |
Chaoyang University of Technology (CYUT) |
3rd Author's Name |
Qiangfu Zhao |
3rd Author's Affiliation |
The University of Aizu (UoA) |
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Speaker |
Author-1 |
Date Time |
2022-07-29 13:30:00 |
Presentation Time |
25 minutes |
Registration for |
R |
Paper # |
R2022-9 |
Volume (vol) |
vol.122 |
Number (no) |
no.140 |
Page |
pp.1-6 |
#Pages |
6 |
Date of Issue |
2022-07-22 (R) |
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