| IEICE Technical Committee Submission System Conference Paper's Information |
Online Proceedings [Sign in] Tech. Rep. Archives |
| Go Top Page | Go Previous | [Japanese] / [English] |
| Paper Abstract and Keywords | ||
| Presentation | 2022-11-10 14:00 [Invited Talk] Modeling Electrical Properties of CrSi Thin Films Kenichiro Sonoda, Nobuhito Shiraishi, Kazuyoshi Maekawa, Nozomi Ito, Eiji Hasegawa, Tamotsu Ogata (Renesas Electronics)  SDM2022-67 |
|
| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Electrical resistivity of CrSi thin films is modeled considering phase transitions and grain growth during thermal annealing. The effective medium approximation is used to calculate the electrical resistivity of the thin film which comprises several materials and phases including grain boundaries. The phase transition from as-deposited amorphous to poly-crystalline including a meta-stable state leads to high resistivity within a certain range of annealing temperature. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | thin film resistor / chromium silicon / phase transition / grain growth / modeling / simulation / / | |
| Reference Info. | IEICE Tech. Rep., vol. 122, no. 247, SDM2022-67, pp. 14-18, Nov. 2022. | |
| Paper # | SDM2022-67 | |
| Date of Issue | 2022-11-03 (SDM) | |
| ISSN | Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2022-67 |
|
| Conference Information | |
| Committee | SDM |
| Conference Date | 2022-11-10 - 2022-11-11 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process, Device, Circuit simulation, etc. |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2022-11-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Modeling Electrical Properties of CrSi Thin Films |
| Sub Title (in English) | |
| Keyword(1) | thin film resistor |
| Keyword(2) | chromium silicon |
| Keyword(3) | phase transition |
| Keyword(4) | grain growth |
| Keyword(5) | modeling |
| Keyword(6) | simulation |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Kenichiro Sonoda |
| 1st Author's Affiliation | Renesas Electronics (Renesas Electronics) |
| 2nd Author's Name | Nobuhito Shiraishi |
| 2nd Author's Affiliation | Renesas Electronics (Renesas Electronics) |
| 3rd Author's Name | Kazuyoshi Maekawa |
| 3rd Author's Affiliation | Renesas Electronics (Renesas Electronics) |
| 4th Author's Name | Nozomi Ito |
| 4th Author's Affiliation | Renesas Electronics (Renesas Electronics) |
| 5th Author's Name | Eiji Hasegawa |
| 5th Author's Affiliation | Renesas Electronics (Renesas Electronics) |
| 6th Author's Name | Tamotsu Ogata |
| 6th Author's Affiliation | Renesas Electronics (Renesas Electronics) |
| 7th Author's Name | |
| 7th Author's Affiliation | () |
| 8th Author's Name | |
| 8th Author's Affiliation | () |
| 9th Author's Name | |
| 9th Author's Affiliation | () |
| 10th Author's Name | |
| 10th Author's Affiliation | () |
| 11th Author's Name | |
| 11th Author's Affiliation | () |
| 12th Author's Name | |
| 12th Author's Affiliation | () |
| 13th Author's Name | |
| 13th Author's Affiliation | () |
| 14th Author's Name | |
| 14th Author's Affiliation | () |
| 15th Author's Name | |
| 15th Author's Affiliation | () |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2022-11-10 14:00:00 |
| Presentation Time | 60 minutes |
| Registration for | SDM |
| Paper # | SDM2022-67 |
| Volume (vol) | vol.122 |
| Number (no) | no.247 |
| Page | pp.14-18 |
| #Pages | 5 |
| Date of Issue | 2022-11-03 (SDM) |
[Return to Top Page]