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| Presentation | 2023-08-21 15:55 Measurement of crystal Qs by using phase noise Yuta Aoki, Kengo Hara, Yasuaki Watanabe (Tokyo Metropolitan Univ.)  US2023-36 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | QCMs are generally thought to measure the mass associated with changes in the viscosity of water, oil, etc., but the largest market is vacuum deposition processes such as vapor eposition equipment and sputtering equipment required for semiconductor manufacturing. The rocesses call for measurement of resonant frequency and Q factor. So, we have considered using a signal source analyzer for measuring these value. We compared the phase noise of a new QCMs and a slightly used ones to research effectiveness of measuring with phase noises. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | QCM / Signal Source Analyzer / Phase noise / Q factor / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 123, no. 157, US2023-36, pp. 30-33, Aug. 2023. | |
| Paper # | US2023-36 | |
| Date of Issue | 2023-08-14 (US) | |
| ISSN | Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | US2023-36 |
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| Conference Information | |
| Committee | US |
| Conference Date | 2023-08-21 - 2023-08-21 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Tokyo Tech Front, Tokyo Tech (Ookayama Campus) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Underwater acoustics, Ultrasonics, etc. |
| Paper Information | |
| Registration To | US |
| Conference Code | 2023-08-US |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Measurement of crystal Qs by using phase noise |
| Sub Title (in English) | |
| Keyword(1) | QCM |
| Keyword(2) | Signal Source Analyzer |
| Keyword(3) | Phase noise |
| Keyword(4) | Q factor |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Yuta Aoki |
| 1st Author's Affiliation | Tokyo Metropolitan University (Tokyo Metropolitan Univ.) |
| 2nd Author's Name | Kengo Hara |
| 2nd Author's Affiliation | Tokyo Metropolitan University (Tokyo Metropolitan Univ.) |
| 3rd Author's Name | Yasuaki Watanabe |
| 3rd Author's Affiliation | Tokyo Metropolitan University (Tokyo Metropolitan Univ.) |
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| Speaker | Author-1 |
| Date Time | 2023-08-21 15:55:00 |
| Presentation Time | 25 minutes |
| Registration for | US |
| Paper # | US2023-36 |
| Volume (vol) | vol.123 |
| Number (no) | no.157 |
| Page | pp.30-33 |
| #Pages | 4 |
| Date of Issue | 2023-08-14 (US) |
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