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Paper Abstract and Keywords
Presentation 2023-11-27 16:10
30-layer polarization inversion HBAR for acoustic separation of piezoelectric layer and substrate
Kazutaka Shiraiwa, Takahiko Yanagitani (Waseda univ) US2023-54
Abstract (in Japanese) (See Japanese page) 
(in English) There are two types of BAW resonators, FBAR (film bulk acoustic resonator: free standing structure) and SMR (Solidly mounted resonator: Bragg reflector structure). In these resonators, the substrate and the piezoelectric layer are acoustically isolated. Therefore, a free resonance of only piezoelectric layer can be achieved.. On the other hand, the acoustical isolation between substrate and piezoelectric layer can be obtained in HBAR. Consequently the multiple resonances due to the composite resonance of piezoelectric layer and substrate are generated. In this study, we considered that large number of polarization inversion layers leads the confinement of acoustic energy in the polarization inversion layer can be achieved. This can enable acoustic isolation of the substrate and the piezoelectric layer even in the HBAR with substrate. In the simulation results, acoustical isolation between the piezoelectric layer and substrate are promoted by increasing the number of polarization inverted layers. In addition, we fabricated HBAR with 10-layer and 30-layer polarization inversion multilayer and compare them with a single-layer piezoelectric thin film HBAR As a result, it was experimentally demonstrated that the substrate and piezoelectric layers were acoustically isolated as the number of layers increases.
Keyword (in Japanese) (See Japanese page) 
(in English) BAW filter / ScAlN / polarization inversion structure / c-axis zig-zag / / / /  
Reference Info. IEICE Tech. Rep., vol. 123, no. 286, US2023-54, pp. 61-66, Nov. 2023.
Paper # US2023-54 
Date of Issue 2023-11-20 (US) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF US2023-54

Conference Information
Committee US  
Conference Date 2023-11-27 - 2023-11-27 
Place (in Japanese) (See Japanese page) 
Place (in English) Shizuoka University 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Ultrasonics, etc. 
Paper Information
Registration To US 
Conference Code 2023-11-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) 30-layer polarization inversion HBAR for acoustic separation of piezoelectric layer and substrate 
Sub Title (in English)  
Keyword(1) BAW filter  
Keyword(2) ScAlN  
Keyword(3) polarization inversion structure  
Keyword(4) c-axis zig-zag  
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1st Author's Name Kazutaka Shiraiwa  
1st Author's Affiliation Waseda university (Waseda univ)
2nd Author's Name Takahiko Yanagitani  
2nd Author's Affiliation Waseda university (Waseda univ)
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Speaker Author-1 
Date Time 2023-11-27 16:10:00 
Presentation Time 25 minutes 
Registration for US 
Paper # US2023-54 
Volume (vol) vol.123 
Number (no) no.286 
Page pp.61-66 
#Pages 6 
Date of Issue 2023-11-20 (US) 

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