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Paper Abstract and Keywords
Presentation 2025-01-23 13:15
[Poster Presentation] Dependence of the thin film formation of layered BN by low-pressure CVD
Soma Ota, Riki Aoike, Akira Takemura, Hayato Nakano, Takumi Naruse, Ryota Aoyama, Hiroko Kominami, Kazuhiko Hara (Shizuoka Univ.) EID2024-1
Abstract (in Japanese) (See Japanese page) 
(in English) The effect of growth atmosphere on the formation of BN polytypes was investigated for layered BN films grown on c-plane sapphire substrates by low-pressure CVD using BCl3 and NH3 as sources. Among the ambient gases, r-BN was predominantly formed in the N2 and Ar atmospheres, while a mixture of h-BN and r-BN films was formed in the H2 atmosphere. Based on the relationship between these crystal structures and C impurity concentrations, we discussed the effect of carbon incorporation into the films as a factor promoting the transition from h-BN to r-BN.
Keyword (in Japanese) (See Japanese page) 
(in English) Boron nitride / Chemical vapor deposition / Polytype / Cathodoluminescence / / / /  
Reference Info. IEICE Tech. Rep., vol. 124, no. 354, EID2024-1, pp. 1-4, Jan. 2025.
Paper # EID2024-1 
Date of Issue 2025-01-16 (EID) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee EID ITE-IDY SID-JC IEIJ-SSL IEE-EDD  
Conference Date 2025-01-23 - 2025-01-24 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To EID 
Conference Code 2025-01-EID-IDY-JC-SSL-EDD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Dependence of the thin film formation of layered BN by low-pressure CVD 
Sub Title (in English)  
Keyword(1) Boron nitride  
Keyword(2) Chemical vapor deposition  
Keyword(3) Polytype  
Keyword(4) Cathodoluminescence  
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Keyword(6)  
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1st Author's Name Soma Ota  
1st Author's Affiliation Shizuoka University (Shizuoka Univ.)
2nd Author's Name Riki Aoike  
2nd Author's Affiliation Shizuoka University (Shizuoka Univ.)
3rd Author's Name Akira Takemura  
3rd Author's Affiliation Shizuoka University (Shizuoka Univ.)
4th Author's Name Hayato Nakano  
4th Author's Affiliation Shizuoka University (Shizuoka Univ.)
5th Author's Name Takumi Naruse  
5th Author's Affiliation Shizuoka University (Shizuoka Univ.)
6th Author's Name Ryota Aoyama  
6th Author's Affiliation Shizuoka University (Shizuoka Univ.)
7th Author's Name Hiroko Kominami  
7th Author's Affiliation Shizuoka University (Shizuoka Univ.)
8th Author's Name Kazuhiko Hara  
8th Author's Affiliation Shizuoka University (Shizuoka Univ.)
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Speaker Author-1 
Date Time 2025-01-23 13:15:00 
Presentation Time 5 minutes 
Registration for EID 
Paper # EID2024-1 
Volume (vol) vol.124 
Number (no) no.354 
Page pp.1-4 
#Pages 4 
Date of Issue 2025-01-16 (EID) 

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