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Technical Committee on Component Parts and Materials (CPM) (Searched in: 2008)
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Search Results: Keywords 'from:2008-08-04 to:2008-08-04'
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[Go to Official CPM Homepage (Japanese)] |
Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Ascending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
CPM |
2008-08-04 14:00 |
Hokkaido |
Muroran Institute of Technology |
Development of Surface-Wave Plasma Generation Apparatus and Application to Semiconductor Processing Hisashi Fukuda (Muroran Inst. Technol.), Masakazu Furukawa (ARIC) CPM2008-41 |
We have developed a high-density surface-wave plasma apparatus for the application to next generation semiconductor fabr... [more] |
CPM2008-41 pp.1-4 |
CPM |
2008-08-04 14:25 |
Hokkaido |
Muroran Institute of Technology |
Field Emission Characteristics of Sputter Deposited Carbon Films Kei Miyazaki, Yoshiyuki Taguchi, Hirofumi Saito, Takuya Miyanaga, Tomohiko Yamakami, Rinpei Hayashibe, Kiichi Kamimura (Shinshu Univ.) CPM2008-42 |
The field emission characteristics of sputter deposited carbon films were measured and discussed. The low threshold fie... [more] |
CPM2008-42 pp.5-8 |
CPM |
2008-08-04 14:50 |
Hokkaido |
Muroran Institute of Technology |
Preparation of Mg-Ni thin films by Alternation Layer Deposition Method Hidehiko Shimizu, Makoto Hirata, Tomohiro Okada, Haruo Iwano, Takahiro Kawakami (Niigata Univ.) CPM2008-43 |
Mg-Ni films were attempted by alternation layer deposition of Mg film and Ni film using magnetron spattering (MS) and sp... [more] |
CPM2008-43 pp.9-14 |
CPM |
2008-08-04 15:25 |
Hokkaido |
Muroran Institute of Technology |
Organic Thin Film Transistor with Substituted Polyacetylenes containing Hetero Atoms Tetsuya Imamura, Yasuteru Mawatari, Hisashi Fukuda, Masayoshi Tabata (Muroran Inst. Technol) CPM2008-44 |
Organic thin film transistors (OTFTs) using substituted polyacetylenes which have a helical form were fabricated. Substi... [more] |
CPM2008-44 pp.15-18 |
CPM |
2008-08-04 15:50 |
Hokkaido |
Muroran Institute of Technology |
Poly-3-hexylthiophene Thin Film Formation and Application to Organic Thin Film Transistor Hisashi Fukuda, Katsuhiro Uesugi (Muroran Inst. Technol.) CPM2008-45 |
Regioregular poly-3-hexylthiophene (P3HT) thin films were formed using a spin coating technique. After deposition in a m... [more] |
CPM2008-45 pp.19-22 |
CPM |
2008-08-04 16:15 |
Hokkaido |
Muroran Institute of Technology |
Pentacene Thin Film Formation and Application to Organic Transistor Yoshihiro Tada, Shinya Yamada, Katsuhiro Uesugi, Hisashi Fukuda (Muroran Inst. Technol.) CPM2008-46 |
We have fabricated an organic thin film transistor (OTFT) with an active layer of pentacene thin film evaporated by vacu... [more] |
CPM2008-46 pp.23-26 |
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