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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
HWS, VLD |
2023-03-01 14:55 |
Okinawa |
(Primary: On-site, Secondary: Online) |
High fidelity mask pattern generation method by amplitude component evaluation Yu Horimoto, Sota Saito, Atsushi Takahashi (Tokyo Tech), Yukihide Kohira (Univ. of Aizu), Chikaaki Kodama (KIOXIA) VLD2022-79 HWS2022-50 |
[more] |
VLD2022-79 HWS2022-50 pp.37-42 |
HWS, VLD |
2023-03-01 15:20 |
Okinawa |
(Primary: On-site, Secondary: Online) |
A fast SRAF optimization using Voronoi diagram and LUT based intensity evaluation Sota Saito, Yu Horimoto, Atsushi Takahashi (Tokyo Tech), Yukihide Kohira (Univ. of Aizu), Chikaaki Kodama (KIOXIA) VLD2022-80 HWS2022-51 |
Recent advances in technology nodes have led to problems in optical lithography such as reduced fidelity of transferred ... [more] |
VLD2022-80 HWS2022-51 pp.43-48 |
VLD, DC, RECONF, ICD, IPSJ-SLDM [detail] |
2022-11-30 10:20 |
Kumamoto |
(Primary: On-site, Secondary: Online) |
A fast SRAF optimization used LUT based point intensity calculation Sota Saito, Atsushi Takahashi (Tokyo Tech) VLD2022-40 ICD2022-57 DC2022-56 RECONF2022-63 |
Recent advances in technology nodes have led to problems in optical lithography such as reduced fidelity of transferred ... [more] |
VLD2022-40 ICD2022-57 DC2022-56 RECONF2022-63 pp.121-126 |
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