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ED 2011-07-29
14:20		 Niigata Multimedia system center, Nagaoka Univ. of Tech. Characterization of sputtered AlN amorphous films and their applications to AlGaN/GaN MIS-HFET
Hong-An Shih, Masahiro Kudo, Masashi Akabori, Toshi-kazu Suzuki (JAIST) ED2011-39		  [more] ED2011-39
pp.13-16
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