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Paper #
SDM
2006-06-22
15:30
Hiroshima
Faculty Club, Hiroshima Univ.
Work Functions at Impurity Pileup Ni-FUSI/SiO(N) Interface and FUGE(Fully Germanided) gates
Yoshinori Tsuchiya
,
Masahiko Yoshiki
,
Atsuhiro Kinoshita
,
Masato Koyama
,
Junji Koga
,
Akira Nishiyama
(
Toshiba Co,
)
In this paper, we show the results of our recent work on work function control in metal gate, which is one of the most d...
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SDM2006-64
pp.125-130
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