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Abstract
Paper #
SDM
2007-03-15
15:00
Tokyo
Kikai-Shinko-Kaikan Bldg.
[Invited Talk] (111)-Oriented SrRuO3/Pt Bottom Electrode for Reproducible Preparation of Metal Organic Chemical Vapour Deposited Pb(Zr,Ti)O3 Films for High Density Ferroelectric Random Access
Niclus Menou
(
Tokyo Inst. of Tech.
),
Hiroki Kuwabara
,
Hiroshi Funakubo
(
Tokyo Tech.
)
[more]
SDM2006-258
pp.21-26
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