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Abstract
Paper #
CPM
2005-11-12
12:10
Fukui
Investigation of sputter-deposition process in pulse sputtering
Yoichi Hoshi
(
Tokyo Polytchinic Univ.
),
Yuji Kuniyoshi
(
Tokyo Polytechinic Univ.
),
Osamu Kamiya
(
Canon Inc.
),
Hidehiko Shimizu
(
Niigata Univ.
)
[more]
CPM2005-168
pp.33-38
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