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ED 2008-06-13
16:35		 Ishikawa Kanazawa University Drying behavior of remaining liquid film and droplet in Marangoni drying
Yasuharu Miyamoto (Grad. school of Shibaura inst. of Tech.), Junji Kamoshida, Jun Yamada (Shibaura Inst. of Tech.) ED2008-30		 To clarify the drying mechanism of remaining liquid film and droplet on a wafer during gas dissolution in Marangoni dryi... [more] ED2008-30
pp.47-50
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