| Paper Abstract and Keywords |
| Presentation |
2006-06-02 09:35
Hybrid System for Measuring Surface Undulation by Means of Reflection Method and Image Method
Tomotaka Kouzuki, Qin Shu (Univ. of Fukui), Yasunori Touma (Hokkei), Hiroshi Suga (Hiroshima International Univ.), Kazuhiko Ishikawa (Fukui Nat. Col. of Tech.), Tetsuma Sakurai (Univ. of Fukui), Masahiro Ueda (University of Fukui) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
A hybrid system for measuring both surface undulation and surface roughness has been proposed by means of laser reflection and laser scattering. Two main subsystems are incorporated in a body; i.e., it is a hybrid system, with one subsystem based on a laser reflection and used for measuring a surface undulation on a mirror-like surface, and the other based on an imaging of the irradiated portion and used for a surface roughness on a rough surface. It was found that the subsystem for surface undulation has a spatial resolution of 1 nm with a measurement frequency of 24 Hz, and that the subsystem for roughness has a spatial resolution of 2μm with a measurement frequency of about 100 Hz. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Real-time measurement / Surface undulation / Surface roughness / Laser reflection / Laser scattering / / / |
| Reference Info. |
IEICE Tech. Rep., vol. 106, no. 90, LQE2006-1, pp. 1-6, June 2006. |
| Paper # |
LQE2006-1 |
| Date of Issue |
2006-05-26 (LQE) |
| ISSN |
Print edition: ISSN 0913-5685 |
| Download PDF |
|
| Conference Information |
| Committee |
LQE |
| Conference Date |
2006-06-02 - 2006-06-02 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
University of Fukui |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Quantum Optics, Non-linear Optics, Ultra-high Speed Phenomenon, Laser Physics |
| Paper Information |
| Registration To |
LQE |
| Conference Code |
2006-06-LQE |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Hybrid System for Measuring Surface Undulation by Means of Reflection Method and Image Method |
| Sub Title (in English) |
|
| Keyword(1) |
Real-time measurement |
| Keyword(2) |
Surface undulation |
| Keyword(3) |
Surface roughness |
| Keyword(4) |
Laser reflection |
| Keyword(5) |
Laser scattering |
| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Tomotaka Kouzuki |
| 1st Author's Affiliation |
University of Fukui (Univ. of Fukui) |
| 2nd Author's Name |
Qin Shu |
| 2nd Author's Affiliation |
University of Fukui (Univ. of Fukui) |
| 3rd Author's Name |
Yasunori Touma |
| 3rd Author's Affiliation |
Hokkei Industries Co. Ltd. (Hokkei) |
| 4th Author's Name |
Hiroshi Suga |
| 4th Author's Affiliation |
Hiroshima International University (Hiroshima International Univ.) |
| 5th Author's Name |
Kazuhiko Ishikawa |
| 5th Author's Affiliation |
Fukui National College of Technology (Fukui Nat. Col. of Tech.) |
| 6th Author's Name |
Tetsuma Sakurai |
| 6th Author's Affiliation |
University of Fukui (Univ. of Fukui) |
| 7th Author's Name |
Masahiro Ueda |
| 7th Author's Affiliation |
University of Fukui (University of Fukui) |
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| Speaker |
Author-1 |
| Date Time |
2006-06-02 09:35:00 |
| Presentation Time |
25 minutes |
| Registration for |
LQE |
| Paper # |
LQE2006-1 |
| Volume (vol) |
vol.106 |
| Number (no) |
no.90 |
| Page |
pp.1-6 |
| #Pages |
6 |
| Date of Issue |
2006-05-26 (LQE) |