| Paper Abstract and Keywords |
| Presentation |
2006-06-22 15:05
XPS studies on barrier height at Au/ultra-thin SiO2 interface
Haruhiko Suzuki, Akira Hasegawa, Hiroshi Nohira, Takeo Hattori (Musashi inst technol), Moroyuki Yamawaki, Nobuko Suzuki (SOKENDAI), Daisuke Kobayashi, Kazuyuki Hirose (ISAS) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
As a result of ongoing scale-down of Si-MOS devices, gate SiO2 films have been thinned down to 0.8 nm. In this study, the metal/SiO2 barrier height for ultrathin SiO2 films of less than 1-nm thickness has been investigated by X-ray photoelectron spectroscopy (XPS). |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
XPS / Barrier height / Metal/SiO2 / Ultrathin SiO2 / Insulator / / / |
| Reference Info. |
IEICE Tech. Rep., vol. 106, no. 108, SDM2006-63, pp. 119-124, June 2006. |
| Paper # |
SDM2006-63 |
| Date of Issue |
2006-06-14 (SDM) |
| ISSN |
Print edition: ISSN 0913-5685 |
| Download PDF |
|
| Conference Information |
| Committee |
SDM |
| Conference Date |
2006-06-21 - 2006-06-22 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Faculty Club, Hiroshima Univ. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Science and Technologies of Dielectric Thin Films for Future Electron Devices |
| Paper Information |
| Registration To |
SDM |
| Conference Code |
2006-06-SDM |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
XPS studies on barrier height at Au/ultra-thin SiO2 interface |
| Sub Title (in English) |
* |
| Keyword(1) |
XPS |
| Keyword(2) |
Barrier height |
| Keyword(3) |
Metal/SiO2 |
| Keyword(4) |
Ultrathin SiO2 |
| Keyword(5) |
Insulator |
| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Haruhiko Suzuki |
| 1st Author's Affiliation |
Musashi institute of Technology (Musashi inst technol) |
| 2nd Author's Name |
Akira Hasegawa |
| 2nd Author's Affiliation |
Musashi institute of Technology (Musashi inst technol) |
| 3rd Author's Name |
Hiroshi Nohira |
| 3rd Author's Affiliation |
Musashi institute of Technology (Musashi inst technol) |
| 4th Author's Name |
Takeo Hattori |
| 4th Author's Affiliation |
Musashi institute of Technology (Musashi inst technol) |
| 5th Author's Name |
Moroyuki Yamawaki |
| 5th Author's Affiliation |
The Graduate University for Advanced Studies (SOKENDAI) |
| 6th Author's Name |
Nobuko Suzuki |
| 6th Author's Affiliation |
The Graduate University for Advanced Studies (SOKENDAI) |
| 7th Author's Name |
Daisuke Kobayashi |
| 7th Author's Affiliation |
Institute of Space and Astronautical Science (ISAS) |
| 8th Author's Name |
Kazuyuki Hirose |
| 8th Author's Affiliation |
Institute of Space and Astronautical Science (ISAS) |
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| Speaker |
Author-1 |
| Date Time |
2006-06-22 15:05:00 |
| Presentation Time |
25 minutes |
| Registration for |
SDM |
| Paper # |
SDM2006-63 |
| Volume (vol) |
vol.106 |
| Number (no) |
no.108 |
| Page |
pp.119-124 |
| #Pages |
6 |
| Date of Issue |
2006-06-14 (SDM) |