| Paper Abstract and Keywords |
| Presentation |
2006-07-28 09:45
Numarical Analysis of Microwave Surface Plasma Processing by FDTD Method
Taiki Miyoshi, Hideki Kawaguchi, Masakazu Furukawa (Muroran Inst. Tech.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
The Surface-wave enhanced plasma process is advanced method of semiconductor device fabrications. However, Relation between microwave and plasma properties in this process is not sufficiently understood, and microwave requires optimizing shape and size of the device, because wavelength is almost same size as the device. Beyond on these backgrounds, we consider effective design of the device based on numerical analysis of microwave behavior by FDTD method coupling with plasma equation. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
FDTD / surface-wave enhanced plasma / plasma / microwave / / / / |
| Reference Info. |
IEICE Tech. Rep., vol. 106, July 2006. |
| Paper # |
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| Date of Issue |
2006-07-20 (MW, OPE) |
| ISSN |
Print edition: ISSN 0913-5685 |
| Download PDF |
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| Conference Information |
| Committee |
MW OPE EMT |
| Conference Date |
2006-07-27 - 2006-07-28 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
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| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
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| Paper Information |
| Registration To |
EMT |
| Conference Code |
2006-07-MW-OPE-EMT |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Numarical Analysis of Microwave Surface Plasma Processing by FDTD Method |
| Sub Title (in English) |
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| Keyword(1) |
FDTD |
| Keyword(2) |
surface-wave enhanced plasma |
| Keyword(3) |
plasma |
| Keyword(4) |
microwave |
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| 1st Author's Name |
Taiki Miyoshi |
| 1st Author's Affiliation |
Muroran Institute of Technology (Muroran Inst. Tech.) |
| 2nd Author's Name |
Hideki Kawaguchi |
| 2nd Author's Affiliation |
Muroran Institute of Technology (Muroran Inst. Tech.) |
| 3rd Author's Name |
Masakazu Furukawa |
| 3rd Author's Affiliation |
Muroran Institute of Technology (Muroran Inst. Tech.) |
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| Speaker |
Author-1 |
| Date Time |
2006-07-28 09:45:00 |
| Presentation Time |
25 minutes |
| Registration for |
EMT |
| Paper # |
MW2006-67, OPE2006-59 |
| Volume (vol) |
vol.106 |
| Number (no) |
no.186(MW), no.187(OPE) |
| Page |
pp.175-180 |
| #Pages |
6 |
| Date of Issue |
2006-07-20 (MW, OPE) |