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Paper Abstract and Keywords
Presentation 2007-04-20 13:25
Very Fine Droplet Ejection from Electro-Static Inkjet Nozzle and Its Aplication to Metal Induced Crystallization of Silicon
Yuji Ishida, Gou Nakagawa, Tanemasa Asano (Kyushu Univ.) ED2007-2 SDM2007-2 OME2007-2
Abstract (in Japanese) (See Japanese page) 
(in English) Droplet ejection from an electrostatic inkjet nozzle having a needle has been investigated. It is found that reducing the apex radius of the needle is effective in drawing fine dot pattern. The nozzle having a needle of 2 $\mu$m in apex radius could pattern the dots of 0.86 $\mu$m size on the average, when a single pulse of rectangular voltage of 3 kV for 5 ms was applied. We demonstrated for the first time crystallization of amorphous silicon (\textit{a}-Si) film induced by inkjet-patterned Ni colloidal solution. Dependence of crystallization behavior of \textit{a}-Si on dot size was investigated by electron back scattering pattern (EBSP) analysis. Metal induced crystallization behavior is categorized into three modes: single-crystal grain growth, poly-crystal growth and lateral-crystal growth. Statistical analysis suggests that, when the dot size is 0.86 $\mu$m, a single-crystal grain is grown at the inkjet-printed sites with probability 0.62.
Keyword (in Japanese) (See Japanese page) 
(in English) inkjet patterning / electrostatic inkjet nozzle / Ni nano-particles / thin-film transistor / polycrystalline silicon / metal induced crystallization / amorphous silicon / single-crystal grain  
Reference Info. IEICE Tech. Rep., vol. 107, no. 14, SDM2007-2, pp. 5-10, April 2007.
Paper # SDM2007-2 
Date of Issue 2007-04-13 (ED, SDM, OME) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2007-2 SDM2007-2 OME2007-2

Conference Information
Committee OME SDM ED  
Conference Date 2007-04-20 - 2007-04-20 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To SDM 
Conference Code 2007-04-OME-SDM-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Very Fine Droplet Ejection from Electro-Static Inkjet Nozzle and Its Aplication to Metal Induced Crystallization of Silicon 
Sub Title (in English)  
Keyword(1) inkjet patterning  
Keyword(2) electrostatic inkjet nozzle  
Keyword(3) Ni nano-particles  
Keyword(4) thin-film transistor  
Keyword(5) polycrystalline silicon  
Keyword(6) metal induced crystallization  
Keyword(7) amorphous silicon  
Keyword(8) single-crystal grain  
1st Author's Name Yuji Ishida  
1st Author's Affiliation Kyushu University (Kyushu Univ.)
2nd Author's Name Gou Nakagawa  
2nd Author's Affiliation Kyushu University (Kyushu Univ.)
3rd Author's Name Tanemasa Asano  
3rd Author's Affiliation Kyushu University (Kyushu Univ.)
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Speaker Author-1 
Date Time 2007-04-20 13:25:00 
Presentation Time 25 minutes 
Registration for SDM 
Paper # ED2007-2, SDM2007-2, OME2007-2 
Volume (vol) vol.107 
Number (no) no.13(ED), no.14(SDM), no.15(OME) 
Page pp.5-10 
#Pages 6 
Date of Issue 2007-04-13 (ED, SDM, OME) 

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