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Paper Abstract and Keywords
Presentation 2007-05-25 16:30
Fabrication of Si wire waveguides by selective oxidation of Si
Koichi Iiyama, Satoshi Asai, Masahiro Wakashima (Kanazawa Univ.) LQE2007-15
Abstract (in Japanese) (See Japanese page) 
(in English) Si photonic wire waveguides are fabricated by selective oxidation of Si. A SOI wafer on which a 3 mm-wide Si3N4 film is formed is oxidized. The Si under the Si3N4 film is not oxidized and works as a core, and the Si without the Si3N4 film is oxidized and works as a clad. The roughness at the core/clad interface is smoothed while the oxidation process, and then the propagation loss is reduced. The resultant waveguide is multimode, and the propagation loss is decreased by 4 dB as compared to the conventional fabrication process.
Keyword (in Japanese) (See Japanese page) 
(in English) Optical waveguide / Si photonic wire waveguide / Selective oxidation / Propagation loss / / / /  
Reference Info. IEICE Tech. Rep., vol. 107, no. 71, LQE2007-15, pp. 69-72, May 2007.
Paper # LQE2007-15 
Date of Issue 2007-05-18 (LQE) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF LQE2007-15

Conference Information
Committee LQE  
Conference Date 2007-05-25 - 2007-05-25 
Place (in Japanese) (See Japanese page) 
Place (in English) Kanazawa Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Quantum optics, nonlinear optics, ultra-high speed phenomenon, etc 
Paper Information
Registration To LQE 
Conference Code 2007-05-LQE 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of Si wire waveguides by selective oxidation of Si 
Sub Title (in English)  
Keyword(1) Optical waveguide  
Keyword(2) Si photonic wire waveguide  
Keyword(3) Selective oxidation  
Keyword(4) Propagation loss  
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Keyword(6)  
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1st Author's Name Koichi Iiyama  
1st Author's Affiliation Kanazawa University (Kanazawa Univ.)
2nd Author's Name Satoshi Asai  
2nd Author's Affiliation Kanazawa University (Kanazawa Univ.)
3rd Author's Name Masahiro Wakashima  
3rd Author's Affiliation Kanazawa University (Kanazawa Univ.)
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Speaker Author-1 
Date Time 2007-05-25 16:30:00 
Presentation Time 25 minutes 
Registration for LQE 
Paper # LQE2007-15 
Volume (vol) vol.107 
Number (no) no.71 
Page pp.69-72 
#Pages 4 
Date of Issue 2007-05-18 (LQE) 

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