| Paper Abstract and Keywords |
| Presentation |
2007-05-25 15:40
Self-correction for the Surface Displacement Measurement by Means of Hybrid Optical Sensor Sinya Hashizume (Hokkei Industries), Qi Gao (Univ. of Fukui), Tomotaka Kozuki (Hiroshima International Univ.), Kazuhiko Ishikawa (Univ. of Fukui), Hiroshi Suga (Hiroshima International Univ.), Tetsuma Sakurai, Masahiro Ueda (Univ. of Fukui) LQE2007-13 |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
A hybrid optical sensor for measuring surface displacement has been proposed by means of laser reflection and laser scattering. Two main subsystems are incorporated in a body; i.e., it is a hybrid system, with one subsystem based on a laser reflection and used for μm measurement, and the other based on an imaging of the irradiated portion and used for nm measurement. Both subsystems have the same optical axis, which results in a co-axial system. The system can then measure surface displacement at a point, which enables self-correction. Both subsystems hardly affects the measurement each other. The spatial resolution of this hybrid system is between sub-nm and 0.3mm. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Hybrid optical sensor / Surface displacement / Co-axial system / Self-correction / / / / |
| Reference Info. |
IEICE Tech. Rep., vol. 107, no. 71, LQE2007-13, pp. 59-64, May 2007. |
| Paper # |
LQE2007-13 |
| Date of Issue |
2007-05-18 (LQE) |
| ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
| Download PDF |
LQE2007-13 |
| Conference Information |
| Committee |
LQE |
| Conference Date |
2007-05-25 - 2007-05-25 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Kanazawa Univ. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Quantum optics, nonlinear optics, ultra-high speed phenomenon, etc |
| Paper Information |
| Registration To |
LQE |
| Conference Code |
2007-05-LQE |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Self-correction for the Surface Displacement Measurement by Means of Hybrid Optical Sensor |
| Sub Title (in English) |
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| Keyword(1) |
Hybrid optical sensor |
| Keyword(2) |
Surface displacement |
| Keyword(3) |
Co-axial system |
| Keyword(4) |
Self-correction |
| Keyword(5) |
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| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Sinya Hashizume |
| 1st Author's Affiliation |
Hokkei Industries Co. Ltd. (Hokkei Industries) |
| 2nd Author's Name |
Qi Gao |
| 2nd Author's Affiliation |
University of Fukui (Univ. of Fukui) |
| 3rd Author's Name |
Tomotaka Kozuki |
| 3rd Author's Affiliation |
Hiroshima International University (Hiroshima International Univ.) |
| 4th Author's Name |
Kazuhiko Ishikawa |
| 4th Author's Affiliation |
University of Fukui (Univ. of Fukui) |
| 5th Author's Name |
Hiroshi Suga |
| 5th Author's Affiliation |
Hiroshima International University (Hiroshima International Univ.) |
| 6th Author's Name |
Tetsuma Sakurai |
| 6th Author's Affiliation |
University of Fukui (Univ. of Fukui) |
| 7th Author's Name |
Masahiro Ueda |
| 7th Author's Affiliation |
University of Fukui (Univ. of Fukui) |
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| Speaker |
Author-3 |
| Date Time |
2007-05-25 15:40:00 |
| Presentation Time |
25 minutes |
| Registration for |
LQE |
| Paper # |
LQE2007-13 |
| Volume (vol) |
vol.107 |
| Number (no) |
no.71 |
| Page |
pp.59-64 |
| #Pages |
6 |
| Date of Issue |
2007-05-18 (LQE) |