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Paper Abstract and Keywords
Presentation 2007-10-05 11:20
Development of a high efficiency Fluorocarbon abatement system utilizing plasma and Ca(OH)2/CaO under a decompression atmosphere
Katsumasa Suzuki, Yoshio Ishihara, Kaoru Sakoda (Taiyo Nippon Sanso Corp.), Yasuyuki Shirai, Masaki Hirayama, Akinobu Teramoto, Tadahiro Ohmi (NICHe), Takayuki Watanabe (Ube Material Industries, Ltd.) SDM2007-184
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
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Reference Info. IEICE Tech. Rep., vol. 107, no. 245, SDM2007-184, pp. 35-38, Oct. 2007.
Paper # SDM2007-184 
Date of Issue 2007-09-27 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM  
Conference Date 2007-10-04 - 2007-10-05 
Place (in Japanese) (See Japanese page) 
Place (in English) Tohoku Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Process Science and Novel Process Technologies 
Paper Information
Registration To SDM 
Conference Code 2007-10-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Development of a high efficiency Fluorocarbon abatement system utilizing plasma and Ca(OH)2/CaO under a decompression atmosphere 
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1st Author's Name Katsumasa Suzuki  
1st Author's Affiliation Taiyo Nippon Sanso Corporation (Taiyo Nippon Sanso Corp.)
2nd Author's Name Yoshio Ishihara  
2nd Author's Affiliation Taiyo Nippon Sanso Corporation (Taiyo Nippon Sanso Corp.)
3rd Author's Name Kaoru Sakoda  
3rd Author's Affiliation Taiyo Nippon Sanso Corporation (Taiyo Nippon Sanso Corp.)
4th Author's Name Yasuyuki Shirai  
4th Author's Affiliation New Industry Creation Hatchery Center (NICHe)
5th Author's Name Masaki Hirayama  
5th Author's Affiliation New Industry Creation Hatchery Center (NICHe)
6th Author's Name Akinobu Teramoto  
6th Author's Affiliation New Industry Creation Hatchery Center (NICHe)
7th Author's Name Tadahiro Ohmi  
7th Author's Affiliation New Industry Creation Hatchery Center (NICHe)
8th Author's Name Takayuki Watanabe  
8th Author's Affiliation Ube Material Industries Ltd (Ube Material Industries, Ltd.)
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Speaker Author-1 
Date Time 2007-10-05 11:20:00 
Presentation Time 25 minutes 
Registration for SDM 
Paper # SDM2007-184 
Volume (vol) vol.107 
Number (no) no.245 
Page pp.35-38 
#Pages 4 
Date of Issue 2007-09-27 (SDM) 

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