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Paper Abstract and Keywords
Presentation 2008-04-18 14:25
Electrodeposition of Organic Dielectric Film on MEMS Devices for improvement of Reliability
Tomomi Sakata, Kei Kuwabara, Norio Sato, Toshishige Shimamura, Hiromu Ishii (NTT), Kazuhisa Kudou, Katsuyuki Machida (NTT-AT) EMD2008-3
Abstract (in Japanese) (See Japanese page) 
(in English) This article introduces a technique that prevents sticking between actuator and control electrode in microelectromechanical-system (MEMS) devices. The technique involves the pretreatment with hydrochloric acid dipping and the electrodeposition of organic dielectric film on the gold electrode. Applying this technique to a vibrational MEMS device exhibits an excellent anti-sticking effect between the vibrator and the control electrode, ensuring high durability.
Keyword (in Japanese) (See Japanese page) 
(in English) electrodeposition / MEMS / anti-sticking / / / / /  
Reference Info. IEICE Tech. Rep., vol. 108, no. 10, EMD2008-3, pp. 13-16, April 2008.
Paper # EMD2008-3 
Date of Issue 2008-04-11 (EMD) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee EMD  
Conference Date 2008-04-18 - 2008-04-18 
Place (in Japanese) (See Japanese page) 
Place (in English) NTT Musashino Research and Development Center 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To EMD 
Conference Code 2008-04-EMD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Electrodeposition of Organic Dielectric Film on MEMS Devices for improvement of Reliability 
Sub Title (in English)  
Keyword(1) electrodeposition  
Keyword(2) MEMS  
Keyword(3) anti-sticking  
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1st Author's Name Tomomi Sakata  
1st Author's Affiliation Nippon Telegraph and Telephone Corp. (NTT)
2nd Author's Name Kei Kuwabara  
2nd Author's Affiliation Nippon Telegraph and Telephone Corp. (NTT)
3rd Author's Name Norio Sato  
3rd Author's Affiliation Nippon Telegraph and Telephone Corp. (NTT)
4th Author's Name Toshishige Shimamura  
4th Author's Affiliation Nippon Telegraph and Telephone Corp. (NTT)
5th Author's Name Hiromu Ishii  
5th Author's Affiliation Nippon Telegraph and Telephone Corp. (NTT)
6th Author's Name Kazuhisa Kudou  
6th Author's Affiliation NTT Advanced Technology Corp. (NTT-AT)
7th Author's Name Katsuyuki Machida  
7th Author's Affiliation NTT Advanced Technology Corp. (NTT-AT)
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Speaker Author-1 
Date Time 2008-04-18 14:25:00 
Presentation Time 25 minutes 
Registration for EMD 
Paper # EMD2008-3 
Volume (vol) vol.108 
Number (no) no.10 
Page pp.13-16 
#Pages 4 
Date of Issue 2008-04-11 (EMD) 

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