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Paper Abstract and Keywords
Presentation 2008-06-13 16:10
Study on Deterioration of Resist Removal Efficiency in SPM, and Experimental Proof of Ashingless Resist Removal Using Electrolyzed Sulfuric Acid Solution
Tatsuo Nagai, Haruyoshi Yamakawa, Minoru Uchida, Toru Otsu, Norihito Ikemiya (Kurita) ED2008-29
Abstract (in Japanese) (See Japanese page) 
(in English) It is known that resist removal capability of SPM gradually deteriorates during the stripping process. Theoretical explanation of this phenomenon has been tried and was concluded that the decrease in the concentration of sulfuric acid caused it. Contrary to this, in the case of electrolyzed sulfuric acid method, both concentrations of sulfuric acid and of peroxodisulfuric acid produced by electrolysis can be kept constant, so that the resist removal capability can be maintained for a long term without changing the liquid. It is proved that resist patterned on φ300mm wafers which is injected with 1E14 of As and can be removed using electrolyzed sulfuric acid solution without ashing process.
Keyword (in Japanese) (See Japanese page) 
(in English) Electrolyzed Sulfuric Acid / Resist Removal / SPM / Ashingless / / / /  
Reference Info. IEICE Tech. Rep., vol. 108, no. 87, ED2008-29, pp. 41-46, June 2008.
Paper # ED2008-29 
Date of Issue 2008-06-06 (ED) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2008-29

Conference Information
Committee ED  
Conference Date 2008-06-13 - 2008-06-14 
Place (in Japanese) (See Japanese page) 
Place (in English) Kanazawa University 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Process and device technology od semiconductors (surface, interface, reliability, etc.) 
Paper Information
Registration To ED 
Conference Code 2008-06-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Study on Deterioration of Resist Removal Efficiency in SPM, and Experimental Proof of Ashingless Resist Removal Using Electrolyzed Sulfuric Acid Solution 
Sub Title (in English)  
Keyword(1) Electrolyzed Sulfuric Acid  
Keyword(2) Resist Removal  
Keyword(3) SPM  
Keyword(4) Ashingless  
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Keyword(6)  
Keyword(7)  
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1st Author's Name Tatsuo Nagai  
1st Author's Affiliation Kurita Water Industries Ltd. (Kurita)
2nd Author's Name Haruyoshi Yamakawa  
2nd Author's Affiliation Kurita Water Industries Ltd. (Kurita)
3rd Author's Name Minoru Uchida  
3rd Author's Affiliation Kurita Water Industries Ltd. (Kurita)
4th Author's Name Toru Otsu  
4th Author's Affiliation Kurita Water Industries Ltd. (Kurita)
5th Author's Name Norihito Ikemiya  
5th Author's Affiliation Kurita Water Industries Ltd. (Kurita)
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Speaker Author-1 
Date Time 2008-06-13 16:10:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2008-29 
Volume (vol) vol.108 
Number (no) no.87 
Page pp.41-46 
#Pages 6 
Date of Issue 2008-06-06 (ED) 

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