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Paper Abstract and Keywords
Presentation 2008-08-05 09:50
Application of silicon field emitter arrays for space charge compensation of low energy ion beam
Mitsuaki Takeuchi (Innovation Plaza Kyoto, JST), Yasuhito Gotoh, Hiroshi Tsuji (Kyoto Univ.), Shigeki Sakai (Nissin Ion Equipment), Tsunenobu Kimoto, Junzo Ishikawa (Kyoto Univ.) ED2008-119
Abstract (in Japanese) (See Japanese page) 
(in English) We demonstrated a space charge compensation by using a surface-carbonized silicon field emitter array(Si:C-FEA). The Si:C-FEA showed good emission properties in Ne gas atmosphere of 2.0$\times$10$^{-4}$Pa. As a result, decrease of the beam divergence was observed in a case of the electron supply. It was found that the Si:C-FEA is possible candidate for the SCC of the ion-implantation.
Keyword (in Japanese) (See Japanese page) 
(in English) ion implantation / space charge compensation / field emitter arrays / silicon / / / /  
Reference Info. IEICE Tech. Rep., vol. 108, no. 177, ED2008-119, pp. 49-52, Aug. 2008.
Paper # ED2008-119 
Date of Issue 2008-07-28 (ED) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2008-119

Conference Information
Committee ED  
Conference Date 2008-08-04 - 2008-08-05 
Place (in Japanese) (See Japanese page) 
Place (in English) Sizuoka Univ. Hamamatsu Campus 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To ED 
Conference Code 2008-08-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Application of silicon field emitter arrays for space charge compensation of low energy ion beam 
Sub Title (in English)  
Keyword(1) ion implantation  
Keyword(2) space charge compensation  
Keyword(3) field emitter arrays  
Keyword(4) silicon  
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1st Author's Name Mitsuaki Takeuchi  
1st Author's Affiliation Innovation Plaza Kyoto, JST (Innovation Plaza Kyoto, JST)
2nd Author's Name Yasuhito Gotoh  
2nd Author's Affiliation Kyoto University (Kyoto Univ.)
3rd Author's Name Hiroshi Tsuji  
3rd Author's Affiliation Kyoto University (Kyoto Univ.)
4th Author's Name Shigeki Sakai  
4th Author's Affiliation Nissin Ion Equipment, Co. Ltd. (Nissin Ion Equipment)
5th Author's Name Tsunenobu Kimoto  
5th Author's Affiliation Kyoto University (Kyoto Univ.)
6th Author's Name Junzo Ishikawa  
6th Author's Affiliation Kyoto University (Kyoto Univ.)
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Speaker Author-1 
Date Time 2008-08-05 09:50:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2008-119 
Volume (vol) vol.108 
Number (no) no.177 
Page pp.49-52 
#Pages 4 
Date of Issue 2008-07-28 (ED) 

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