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Paper Abstract and Keywords
Presentation 2008-10-09 14:30
Planarization of CW laser crystallized Si thin films by chemical mechanical polishing using slurry with ethyl alcohol
Masayuki Numata, Shin-Ichiro Kuroki, Shuntaro Fujii, Koji Kotani, Takashi Ito (Tohoku Univ.) SDM2008-151
Abstract (in Japanese) (See Japanese page) 
(in English) CW laser crystallization of amorphous silicon films is a promising method to realize thin film transistor with high performance. However, the laser crystallized silicon films have large surface roughness. In this paper, a chemical mechanical polishing of laser crystallized Si films was reported.
Keyword (in Japanese) (See Japanese page) 
(in English) CMP / laser crystallization / TFT / / / / /  
Reference Info. IEICE Tech. Rep., vol. 108, no. 236, SDM2008-151, pp. 13-16, Oct. 2008.
Paper # SDM2008-151 
Date of Issue 2008-10-02 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM  
Conference Date 2008-10-09 - 2008-10-10 
Place (in Japanese) (See Japanese page) 
Place (in English) Tohoku Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Process Science and Novel Process Technologies 
Paper Information
Registration To SDM 
Conference Code 2008-10-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Planarization of CW laser crystallized Si thin films by chemical mechanical polishing using slurry with ethyl alcohol 
Sub Title (in English)  
Keyword(1) CMP  
Keyword(2) laser crystallization  
Keyword(3) TFT  
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1st Author's Name Masayuki Numata  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Shin-Ichiro Kuroki  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Shuntaro Fujii  
3rd Author's Affiliation Tohoku University (Tohoku Univ.)
4th Author's Name Koji Kotani  
4th Author's Affiliation Tohoku University (Tohoku Univ.)
5th Author's Name Takashi Ito  
5th Author's Affiliation Tohoku University (Tohoku Univ.)
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Speaker Author-1 
Date Time 2008-10-09 14:30:00 
Presentation Time 30 minutes 
Registration for SDM 
Paper # SDM2008-151 
Volume (vol) vol.108 
Number (no) no.236 
Page pp.13-16 
#Pages 4 
Date of Issue 2008-10-02 (SDM) 

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