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Paper Abstract and Keywords
Presentation 2009-06-11 13:50
Post CMP Cleaning by Megasonic Using Waveguide Tube Type Equipment
Kazunari Suzuki (Kaijo Corp./Shibaura Inst. of Tech.), Ki Han, Shouichi Okano, Junichiro Soejima (Kaijo Corp.), Yoshikazu Koike (Shibaura Inst. of Tech.) ED2009-37
Abstract (in Japanese) (See Japanese page) 
(in English) At single wafer processing, we proposed novel ultrasonic cleaning equipment using the waveguide tube made of quartz. At conventional rod type equipment, ultrasonic waves propagate as longitudinal wave and it form standing wave. On the other hand, at waveguide type equipment, ultrasonic waves propagate as transverse wave and it form traveling wave. Hence,waveguide wall vibrated by sound source through the propagation liquid. Harmonics was confirmed in vibration of the
waveguide wall, and harmonics might be generated in propagation liquid. Particle removal efficiency (PRE) was evaluated at post–CMP cleaning, using waveguide and rod type equipment installed in the spin cleaner.
Keyword (in Japanese) (See Japanese page) 
(in English) Ultrasonic Cleaning / CMP Cleaning / Waveguide mode / LDV Measurement / / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 81, ED2009-37, pp. 7-10, June 2009.
Paper # ED2009-37 
Date of Issue 2009-06-04 (ED) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2009-37

Conference Information
Committee ED  
Conference Date 2009-06-11 - 2009-06-12 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To ED 
Conference Code 2009-06-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Post CMP Cleaning by Megasonic Using Waveguide Tube Type Equipment 
Sub Title (in English)  
Keyword(1) Ultrasonic Cleaning  
Keyword(2) CMP Cleaning  
Keyword(3) Waveguide mode  
Keyword(4) LDV Measurement  
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Keyword(6)  
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1st Author's Name Kazunari Suzuki  
1st Author's Affiliation Kaijo Corporation/Shibaura Institute of Technology (Kaijo Corp./Shibaura Inst. of Tech.)
2nd Author's Name Ki Han  
2nd Author's Affiliation Kaijo Corporation (Kaijo Corp.)
3rd Author's Name Shouichi Okano  
3rd Author's Affiliation Kaijo Corporation (Kaijo Corp.)
4th Author's Name Junichiro Soejima  
4th Author's Affiliation Kaijo Corporation (Kaijo Corp.)
5th Author's Name Yoshikazu Koike  
5th Author's Affiliation Shibaura Institute of Technology (Shibaura Inst. of Tech.)
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Speaker Author-1 
Date Time 2009-06-11 13:50:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2009-37 
Volume (vol) vol.109 
Number (no) no.81 
Page pp.7-10 
#Pages 4 
Date of Issue 2009-06-04 (ED) 

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