Paper Abstract and Keywords |
Presentation |
2009-06-19 15:35
Case study: Fault diagnosis for detecting systematic fault Hiroshi Yamamoto, Hiroki Wada, Toru Ogushi, Michinobu Nakao (Renesas Tech. Corp.) DC2009-17 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Fault diagnosis for products is important for yield learning of the deep sub-micron technology due to various failure mode.
Especially, systematic faults, which are main causes of yield loss, should be identified in a short time.
For this challenge, volume diagnosis and statistical analysis using scan-based fault identification technique have been presented.
This presentation illustrates the techniques for volume diagnosis and detection of systematic faults, and also shows its application. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Fault diagnosis / Volume diagnosis / Systematic faults / / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 109, no. 95, DC2009-17, pp. 35-35, June 2009. |
Paper # |
DC2009-17 |
Date of Issue |
2009-06-12 (DC) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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DC2009-17 |
Conference Information |
Committee |
DC |
Conference Date |
2009-06-19 - 2009-06-19 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Kikai-Shinko-Kaikan Bldg. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Design, Test, Verification |
Paper Information |
Registration To |
DC |
Conference Code |
2009-06-DC |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Case study: Fault diagnosis for detecting systematic fault |
Sub Title (in English) |
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Keyword(1) |
Fault diagnosis |
Keyword(2) |
Volume diagnosis |
Keyword(3) |
Systematic faults |
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1st Author's Name |
Hiroshi Yamamoto |
1st Author's Affiliation |
Renesas Technology Corp. (Renesas Tech. Corp.) |
2nd Author's Name |
Hiroki Wada |
2nd Author's Affiliation |
Renesas Technology Corp. (Renesas Tech. Corp.) |
3rd Author's Name |
Toru Ogushi |
3rd Author's Affiliation |
Renesas Technology Corp. (Renesas Tech. Corp.) |
4th Author's Name |
Michinobu Nakao |
4th Author's Affiliation |
Renesas Technology Corp. (Renesas Tech. Corp.) |
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Speaker |
Author-1 |
Date Time |
2009-06-19 15:35:00 |
Presentation Time |
25 minutes |
Registration for |
DC |
Paper # |
DC2009-17 |
Volume (vol) |
vol.109 |
Number (no) |
no.95 |
Page |
p.35 |
#Pages |
1 |
Date of Issue |
2009-06-12 (DC) |
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