Paper Abstract and Keywords |
Presentation |
2009-07-17 13:00
Trial fabrication of miniature hydrophone with hydrothermally synthesized PZT film deposited on titanium membrane Kazuho Yoshimura, Norimichi Kawashima (Toin Univ. of Yokohama.), Takeyoshi Uchida, Tsuneo Kikuchi (AIST), Minoru Kurosawa (Tokyo Inst. of Tech.), Shinichi Takeuchi (Toin Univ. of Yokohama.) US2009-22 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Our hydrothermally synthesized PZT poly-crystalline film can be deposited on a tiny or complex-shaped titanium substrate. Furthermore, it is thought that ultrasound probes with ultrawide frequency characteristics of their receiving sensitivity can be fabricated with the hydrothermally synthesized PZT poly-crystalline film. We fabricated the miniature needle-type hydrophones with a small aperture by deposition of a hydrothermally synthesized poly-crystalline PZT film on thin titanium wires and measured their performance. However our needle-type hydrophones can not measure for high power ultrasound. We fabricated miniature membrane-type hydrophone with by deposition of a hydrothermally synthesized PZT poly-crystalline film on titanium membrane for measurement of high power ultrasound. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
hydrothermal method / PZT poly-crystalline film / Membrane-type hydrophone / High-intensity focused ultrasound / High power ultrasound / / / |
Reference Info. |
IEICE Tech. Rep., vol. 109, no. 135, US2009-22, pp. 1-6, July 2009. |
Paper # |
US2009-22 |
Date of Issue |
2009-07-10 (US) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
US2009-22 |