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Paper Abstract and Keywords
Presentation 2009-07-31 10:40
Fabrication of Multi-axis Tactile Sensor for Future Robots by Using Microelectromechanical Systems
Masayuki Sohgawa, Takeshi Kanashima (Osaka Univ.), Kaoru Yamashita, Minoru Noda (Kyoto Inst. Tech.), Masanori Okuyama (Osaka Univ.), Haruo Noma (ATR) ED2009-110
Abstract (in Japanese) (See Japanese page) 
(in English) Tactile array sensors with macro-cantilevers embedded in elastomer which can detect both normal and shear stresses have been designed and fabricated.
Inclined cantilevers sensitive to normal and shear stresses can be obtained by using Cr/Si bilayer structure.
These cantilevers can be successfully embedded in the elastomer without their destruction.
The outputs from opposite cantilevers are same signs in the case of normal stress application, but
the outputs are opposite signs in the case of shear stress.
So, normal and shear stresses can be distinguished by summation and difference of outputs, respectively.
Moreover, it is found that the direction of shear stress can be decided from direction of respondent cantilevers.
Keyword (in Japanese) (See Japanese page) 
(in English) tactile sensor / surface micromachining / cantilever / elastomer / finite element method / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 157, ED2009-110, pp. 41-46, July 2009.
Paper # ED2009-110 
Date of Issue 2009-07-23 (ED) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2009-110

Conference Information
Committee ED  
Conference Date 2009-07-30 - 2009-07-31 
Place (in Japanese) (See Japanese page) 
Place (in English) Osaka Univ. Icho-Kaikan 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To ED 
Conference Code 2009-07-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of Multi-axis Tactile Sensor for Future Robots by Using Microelectromechanical Systems 
Sub Title (in English)  
Keyword(1) tactile sensor  
Keyword(2) surface micromachining  
Keyword(3) cantilever  
Keyword(4) elastomer  
Keyword(5) finite element method  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Masayuki Sohgawa  
1st Author's Affiliation Osaka University (Osaka Univ.)
2nd Author's Name Takeshi Kanashima  
2nd Author's Affiliation Osaka University (Osaka Univ.)
3rd Author's Name Kaoru Yamashita  
3rd Author's Affiliation Kyoto Institute of Technology (Kyoto Inst. Tech.)
4th Author's Name Minoru Noda  
4th Author's Affiliation Kyoto Institute of Technology (Kyoto Inst. Tech.)
5th Author's Name Masanori Okuyama  
5th Author's Affiliation Osaka University (Osaka Univ.)
6th Author's Name Haruo Noma  
6th Author's Affiliation Advanced Telecommunication Research Institute International (ATR)
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Speaker Author-1 
Date Time 2009-07-31 10:40:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2009-110 
Volume (vol) vol.109 
Number (no) no.157 
Page pp.41-46 
#Pages 6 
Date of Issue 2009-07-23 (ED) 

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