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| Presentation | 2009-08-10 14:40 An easy fabircation method of Si MOSFETs for semiconductor education Fumihiko Hirose, Tatsuro Miyagi, Yuzuru Narita (Yamagata Univ.)  CPM2009-33 Link to ES Tech. Rep. Archives: CPM2009-33 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | We have developed an easy fabrication method of Si field effect transistors (FETs) with poly(methyl methacrylate) (PMMA) gate films for science education. In this process, we can easily fabricate the silicon FETs only by means of metal deposition and thermal diffusion without any lithography processes. The organic isolation films of PMMA can be deposited by casting or painting at room temperature in air. The metal-organic-semiconductor FETs with PMMA exhibited almost the same drain current – gate voltage characteristics as those of conventional Si metal-oxide-semiconductor FETs, which are suitable for the education material of semiconductor engineering. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 109, no. 171, CPM2009-33, pp. 1-3, Aug. 2009. | |
| Paper # | CPM2009-33 | |
| Date of Issue | 2009-08-03 (CPM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | CPM2009-33 Link to ES Tech. Rep. Archives: CPM2009-33 |
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| Conference Information | |
| Committee | CPM |
| Conference Date | 2009-08-10 - 2009-08-11 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Hirosaki Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Electronic Component Parts and Materials, etc. |
| Paper Information | |
| Registration To | CPM |
| Conference Code | 2009-08-CPM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | An easy fabircation method of Si MOSFETs for semiconductor education |
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| 1st Author's Name | Fumihiko Hirose |
| 1st Author's Affiliation | Yamagata University. (Yamagata Univ.) |
| 2nd Author's Name | Tatsuro Miyagi |
| 2nd Author's Affiliation | Yamagata University. (Yamagata Univ.) |
| 3rd Author's Name | Yuzuru Narita |
| 3rd Author's Affiliation | Yamagata University. (Yamagata Univ.) |
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| Speaker | Author-1 |
| Date Time | 2009-08-10 14:40:00 |
| Presentation Time | 25 minutes |
| Registration for | CPM |
| Paper # | CPM2009-33 |
| Volume (vol) | vol.109 |
| Number (no) | no.171 |
| Page | pp.1-3 |
| #Pages | 3 |
| Date of Issue | 2009-08-03 (CPM) |
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