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Paper Abstract and Keywords
Presentation 2009-08-10 14:40
An easy fabircation method of Si MOSFETs for semiconductor education
Fumihiko Hirose, Tatsuro Miyagi, Yuzuru Narita (Yamagata Univ.) CPM2009-33
Abstract (in Japanese) (See Japanese page) 
(in English) We have developed an easy fabrication method of Si field effect transistors (FETs) with poly(methyl methacrylate) (PMMA) gate films for science education. In this process, we can easily fabricate the silicon FETs only by means of metal deposition and thermal diffusion without any lithography processes. The organic isolation films of PMMA can be deposited by casting or painting at room temperature in air. The metal-organic-semiconductor FETs with PMMA exhibited almost the same drain current – gate voltage characteristics as those of conventional Si metal-oxide-semiconductor FETs, which are suitable for the education material of semiconductor engineering.
Keyword (in Japanese) (See Japanese page) 
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Reference Info. IEICE Tech. Rep., vol. 109, no. 171, CPM2009-33, pp. 1-3, Aug. 2009.
Paper # CPM2009-33 
Date of Issue 2009-08-03 (CPM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF CPM2009-33

Conference Information
Committee CPM  
Conference Date 2009-08-10 - 2009-08-11 
Place (in Japanese) (See Japanese page) 
Place (in English) Hirosaki Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Electronic Component Parts and Materials, etc. 
Paper Information
Registration To CPM 
Conference Code 2009-08-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) An easy fabircation method of Si MOSFETs for semiconductor education 
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1st Author's Name Fumihiko Hirose  
1st Author's Affiliation Yamagata University. (Yamagata Univ.)
2nd Author's Name Tatsuro Miyagi  
2nd Author's Affiliation Yamagata University. (Yamagata Univ.)
3rd Author's Name Yuzuru Narita  
3rd Author's Affiliation Yamagata University. (Yamagata Univ.)
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Speaker Author-1 
Date Time 2009-08-10 14:40:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # CPM2009-33 
Volume (vol) vol.109 
Number (no) no.171 
Page pp.1-3 
#Pages 3 
Date of Issue 2009-08-03 (CPM) 

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