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Paper Abstract and Keywords
Presentation 2009-09-30 09:50
Large-area fabrication of (11-20) textured ZnO piezoelectric films using magnetron sputtering with linear erosion.
Takayuki Kawamoto (Doshisha Univ./Omron Corp.), Takahiko Yanagitani (Nagoya Inst. Tech.), Mami Matsukawa, Yoshiaki Watanabe (Doshisha Univ.), Yoshikazu Mori, Syo Sasaki, Masatoshi Oba (Omron Corp.) US2009-49
Abstract (in Japanese) (See Japanese page) 
(in English) In previous studies, fabrication of (11-20) textured ZnO piezoelectric films have been reported by using RF magnetron sputtering with circular cathode. However, in these studies, there have been two problems related to the practical application. The problems are that (i) highly oriented films can be obtained only in a small area, and (ii) crystallites c-axis in the films was oriented radially in the substrate plane. In this study, we make an attempt to realize the in-plane unidirectional orientation in a large area by using sputtering cathode with linear erosion.
Keyword (in Japanese) (See Japanese page) 
(in English) (11-20) textured ZnO film / RF magnetron sputtering method / circular erosion / radial orientation / linear erosion / unidirectional orientation / large-area fabrication /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 213, US2009-49, pp. 65-70, Sept. 2009.
Paper # US2009-49 
Date of Issue 2009-09-22 (US) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee US  
Conference Date 2009-09-29 - 2009-09-30 
Place (in Japanese) (See Japanese page) 
Place (in English) Noboribetsu Grand Hotel 
Topics (in Japanese) (See Japanese page) 
Topics (in English) General 
Paper Information
Registration To US 
Conference Code 2009-09-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Large-area fabrication of (11-20) textured ZnO piezoelectric films using magnetron sputtering with linear erosion. 
Sub Title (in English)  
Keyword(1) (11-20) textured ZnO film  
Keyword(2) RF magnetron sputtering method  
Keyword(3) circular erosion  
Keyword(4) radial orientation  
Keyword(5) linear erosion  
Keyword(6) unidirectional orientation  
Keyword(7) large-area fabrication  
Keyword(8)  
1st Author's Name Takayuki Kawamoto  
1st Author's Affiliation Doshisha University/Omron Corporation (Doshisha Univ./Omron Corp.)
2nd Author's Name Takahiko Yanagitani  
2nd Author's Affiliation Nagoya Institute of Technology (Nagoya Inst. Tech.)
3rd Author's Name Mami Matsukawa  
3rd Author's Affiliation Doshisha University (Doshisha Univ.)
4th Author's Name Yoshiaki Watanabe  
4th Author's Affiliation Doshisha University (Doshisha Univ.)
5th Author's Name Yoshikazu Mori  
5th Author's Affiliation Omron Corporation (Omron Corp.)
6th Author's Name Syo Sasaki  
6th Author's Affiliation Omron Corporation (Omron Corp.)
7th Author's Name Masatoshi Oba  
7th Author's Affiliation Omron Corporation (Omron Corp.)
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Speaker Author-1 
Date Time 2009-09-30 09:50:00 
Presentation Time 25 minutes 
Registration for US 
Paper # US2009-49 
Volume (vol) vol.109 
Number (no) no.213 
Page pp.65-70 
#Pages 6 
Date of Issue 2009-09-22 (US) 

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