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Paper Abstract and Keywords
Presentation 2009-09-30 09:00
Multilayer shear mode resonator consisting of c-axis tilted ZnO films.
Noki Morisato, Shinji Takayanagi (Doshisha Univ.), Takahiko Yanagitani (Nagoya Inst. of Tech.), Mami Matsukawa, Yoshiaki Watanabe (Doshisha Univ.) US2009-47
Abstract (in Japanese) (See Japanese page) 
(in English) In a previous study, we have reported c-axis 23° tilted ZnO film for shear wave excitations. We here propose a new multilayered resonator consisting of the c-axis tilted ZnO films. Every layer has same thickness, and the c-axis tilt direction in odd and even layers are symmetric with respect to the film surface normal. In this resonator structure, we can increase its thickness without change of shear mode resonant frequency. This provides the expansion of sensing area (in 50  matching) and high power operation. Moreover, longitudinal wave excitation is expected to be suppressed because thickness extensional mode resonant frequency should shifts to lower frequency.
In this study, we have fabricated a multilayered resonator consisting of six layered ZnO films. To prevent degradation of crystalline orientation, SiO2 buffer layers were inserted between each ZnO layer. The influences of the method for fabricating SiO2 on the crystalline orientation also have been investigated. Crystalline orientation of the c-axis tilted ZnO films were confirmed by XRD pole figure analysis and FE-SEM. In the sixth order mode shear mode resonant frequency, high efficient shear mode excitation with relatively suppressed extensional mode excitation was observed. More extensional mode suppression is expected by increasing the number of the layer.
Keyword (in Japanese) (See Japanese page) 
(in English) Multilayered resonator / c-axis tilted ZnO films / Thickness shear mode / Electromechanical coupling coefficient k15 / RF magnetron sputtering method / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 213, US2009-47, pp. 53-58, Sept. 2009.
Paper # US2009-47 
Date of Issue 2009-09-22 (US) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee US  
Conference Date 2009-09-29 - 2009-09-30 
Place (in Japanese) (See Japanese page) 
Place (in English) Noboribetsu Grand Hotel 
Topics (in Japanese) (See Japanese page) 
Topics (in English) General 
Paper Information
Registration To US 
Conference Code 2009-09-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Multilayer shear mode resonator consisting of c-axis tilted ZnO films. 
Sub Title (in English)  
Keyword(1) Multilayered resonator  
Keyword(2) c-axis tilted ZnO films  
Keyword(3) Thickness shear mode  
Keyword(4) Electromechanical coupling coefficient k15  
Keyword(5) RF magnetron sputtering method  
Keyword(6)  
Keyword(7)  
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1st Author's Name Noki Morisato  
1st Author's Affiliation Doshisha University (Doshisha Univ.)
2nd Author's Name Shinji Takayanagi  
2nd Author's Affiliation Doshisha University (Doshisha Univ.)
3rd Author's Name Takahiko Yanagitani  
3rd Author's Affiliation Nagoya Institute of Technology (Nagoya Inst. of Tech.)
4th Author's Name Mami Matsukawa  
4th Author's Affiliation Doshisha University (Doshisha Univ.)
5th Author's Name Yoshiaki Watanabe  
5th Author's Affiliation Doshisha University (Doshisha Univ.)
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Speaker Author-1 
Date Time 2009-09-30 09:00:00 
Presentation Time 25 minutes 
Registration for US 
Paper # US2009-47 
Volume (vol) vol.109 
Number (no) no.213 
Page pp.53-58 
#Pages 6 
Date of Issue 2009-09-22 (US) 

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