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| Presentation | 2009-10-09 09:30 [Invited Talk] High-Density Recording in Mass-Productive Polycrystalline Ferroelectric Thin Film Media Kenjiro Fujimoto, Tatahiro Kawano, Atsushi Onoe (Pioneer Corp.), Masahiro Tamura (AMAYA Corp.), Masaru Umeda, Masayuki Toda (WACOM)  MR2009-25 Link to ES Tech. Rep. Archives: MR2009-25 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | We demonstrate very-high-density ferroelectric recording experiments of 1Tbit/in2 in polycrystalline Pb(Zr,Ti)O3 (PZT) thin film for the first time. A high-quality polycrystalline PZT thin film was successfully deposited on a silicon substrate with a SrRuO3 (SRO) electrode by metal-organic chemical vapor deposition (MOCVD) technique. The roughness of the PZT film was reduced to less than 1 nm by chemical mechanical polishing (CMP) method. The PZT film has a very high controllability for domain inversion. Our fabrication process also enables high productivity. Therefore, our PZT film has potential to be a mass-productive ferroelectric recording medium for high-density storage systems. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Ferroelectric thin film / , high-density recording / recording medium / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 109, Oct. 2009. | |
| Paper # | ||
| Date of Issue | 2009-10-01 (MR) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | MR2009-25 Link to ES Tech. Rep. Archives: MR2009-25 |
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| Conference Information | |
| Committee | ITE-MMS MRIS |
| Conference Date | 2009-10-08 - 2009-10-09 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | FUKUOKA traffic center |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | MRIS |
| Conference Code | 2009-10-MMS-MR |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | High-Density Recording in Mass-Productive Polycrystalline Ferroelectric Thin Film Media |
| Sub Title (in English) | |
| Keyword(1) | Ferroelectric thin film |
| Keyword(2) | , high-density recording |
| Keyword(3) | recording medium |
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| 1st Author's Name | Kenjiro Fujimoto |
| 1st Author's Affiliation | Pioneer Corporation (Pioneer Corp.) |
| 2nd Author's Name | Tatahiro Kawano |
| 2nd Author's Affiliation | Pioneer Corporation (Pioneer Corp.) |
| 3rd Author's Name | Atsushi Onoe |
| 3rd Author's Affiliation | Pioneer Corporation (Pioneer Corp.) |
| 4th Author's Name | Masahiro Tamura |
| 4th Author's Affiliation | AMAYA Corporation (AMAYA Corp.) |
| 5th Author's Name | Masaru Umeda |
| 5th Author's Affiliation | WACOM R&D Corporation (WACOM) |
| 6th Author's Name | Masayuki Toda |
| 6th Author's Affiliation | WACOM R&D Corporation (WACOM) |
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| Speaker | Author-1 |
| Date Time | 2009-10-09 09:30:00 |
| Presentation Time | 55 minutes |
| Registration for | MRIS |
| Paper # | MR2009-25 |
| Volume (vol) | vol.109 |
| Number (no) | no.222 |
| Page | pp.25-29 |
| #Pages | 5 |
| Date of Issue | 2009-10-01 (MR) |
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