Paper Abstract and Keywords |
Presentation |
2009-10-15 13:55
Fabrication and measurement of FEA with a built-in electrostatic lens Tomoya Tagami, Akifumi Koike, Yasuo Takagi (Shizuoka Univ.), Masayoshi Nagao, Tomoya Yoshida, Seigo Kanemaru (AIST), Yoichiro Neo, Toru Aoki, Hidenori Mimura (Shizuoka Univ.) ED2009-117 Link to ES Tech. Rep. Archives: ED2009-117 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We have proposed the new applications by using a fine focusing crossover electron beam from FEA such as electron beam microscope. In order to form a fine focusing crossover electron beam, we have fabricated 5 gated FEA. It was demonstrated that emission current could be kept constantly under focusing operation. In this report, we talk about a clear crossover formation was successfully observed by Electron beam lithography and Knife edge method. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
5 gated FEA / Electron beam lithography / Knife edge / Electron beam microscope / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 109, no. 230, ED2009-117, pp. 7-10, Oct. 2009. |
Paper # |
ED2009-117 |
Date of Issue |
2009-10-08 (ED) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
ED2009-117 Link to ES Tech. Rep. Archives: ED2009-117 |