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Paper Abstract and Keywords
Presentation 2009-10-15 13:55
Fabrication and measurement of FEA with a built-in electrostatic lens
Tomoya Tagami, Akifumi Koike, Yasuo Takagi (Shizuoka Univ.), Masayoshi Nagao, Tomoya Yoshida, Seigo Kanemaru (AIST), Yoichiro Neo, Toru Aoki, Hidenori Mimura (Shizuoka Univ.) ED2009-117
Abstract (in Japanese) (See Japanese page) 
(in English) We have proposed the new applications by using a fine focusing crossover electron beam from FEA such as electron beam microscope. In order to form a fine focusing crossover electron beam, we have fabricated 5 gated FEA. It was demonstrated that emission current could be kept constantly under focusing operation. In this report， we talk about a clear crossover formation was successfully observed by Electron beam lithography and Knife edge method.
Keyword (in Japanese) (See Japanese page) 
(in English) 5 gated FEA / Electron beam lithography / Knife edge / Electron beam microscope / / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 230, ED2009-117, pp. 7-10, Oct. 2009.
Paper # ED2009-117 
Date of Issue 2009-10-08 (ED) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2009-117

Conference Information
Committee ED  
Conference Date 2009-10-15 - 2009-10-16 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To ED 
Conference Code 2009-10-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication and measurement of FEA with a built-in electrostatic lens 
Sub Title (in English)  
Keyword(1) 5 gated FEA  
Keyword(2) Electron beam lithography  
Keyword(3) Knife edge  
Keyword(4) Electron beam microscope  
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Keyword(6)  
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1st Author's Name Tomoya Tagami  
1st Author's Affiliation Shizuoka University (Shizuoka Univ.)
2nd Author's Name Akifumi Koike  
2nd Author's Affiliation Shizuoka University (Shizuoka Univ.)
3rd Author's Name Yasuo Takagi  
3rd Author's Affiliation Shizuoka University (Shizuoka Univ.)
4th Author's Name Masayoshi Nagao  
4th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
5th Author's Name Tomoya Yoshida  
5th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
6th Author's Name Seigo Kanemaru  
6th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
7th Author's Name Yoichiro Neo  
7th Author's Affiliation Shizuoka University (Shizuoka Univ.)
8th Author's Name Toru Aoki  
8th Author's Affiliation Shizuoka University (Shizuoka Univ.)
9th Author's Name Hidenori Mimura  
9th Author's Affiliation Shizuoka University (Shizuoka Univ.)
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Speaker Author-1 
Date Time 2009-10-15 13:55:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2009-117 
Volume (vol) vol.109 
Number (no) no.230 
Page pp.7-10 
#Pages 4 
Date of Issue 2009-10-08 (ED) 

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