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Paper Abstract and Keywords
Presentation 2010-04-23 10:10
[Invited Talk] High Performance Nano System Fabricated by Bio Nano Molecule -- Low Temperature Crystallization of Silicon Thin Film --
Yukiharu Uraoka, Ichiro Yamashita (NAIST) SDM2010-1 OME2010-1
Abstract (in Japanese) (See Japanese page) 
(in English) Bio Nano materials with self assembling ability are very useful for fabricating high performance devices. So far we have succeeded in fabricating floating gate memory or single electron transistors. In this study, we tried to crystallize silicon thin film utilizing Ni nano particles incorporated in feritin protein. We obtained high quality film with large grain and low impurity.
Keyword (in Japanese) (See Japanese page) 
(in English) Bio nano process / Self assebling / Silicon thin film / Low temperature crystallization / / / /  
Reference Info. IEICE Tech. Rep., vol. 110, no. 15, SDM2010-1, pp. 1-4, April 2010.
Paper # SDM2010-1 
Date of Issue 2010-04-16 (SDM, OME) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2010-1 OME2010-1

Conference Information
Committee SDM OME  
Conference Date 2010-04-23 - 2010-04-23 
Place (in Japanese) (See Japanese page) 
Place (in English) Okinawa-Ken-Seinen-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Advanced Thin-Film Devices (Si, Compound, Organic) and Related Topics 
Paper Information
Registration To SDM 
Conference Code 2010-04-SDM-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) High Performance Nano System Fabricated by Bio Nano Molecule 
Sub Title (in English) Low Temperature Crystallization of Silicon Thin Film 
Keyword(1) Bio nano process  
Keyword(2) Self assebling  
Keyword(3) Silicon thin film  
Keyword(4) Low temperature crystallization  
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1st Author's Name Yukiharu Uraoka  
1st Author's Affiliation Nara Institute of Science and Technology (NAIST)
2nd Author's Name Ichiro Yamashita  
2nd Author's Affiliation Nara Institute (NAIST)
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Speaker Author-1 
Date Time 2010-04-23 10:10:00 
Presentation Time 30 minutes 
Registration for SDM 
Paper # SDM2010-1, OME2010-1 
Volume (vol) vol.110 
Number (no) no.15(SDM), no.16(OME) 
Page pp.1-4 
#Pages 4 
Date of Issue 2010-04-16 (SDM, OME) 

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