Paper Abstract and Keywords |
Presentation |
2010-05-14 10:25
Investigation of deposition condition of LiMn2O4 films prepared by RF magnetron sputtering Mitsuhiro Nakamura, Masaaki Isai (Shizuoka Univ.) ED2010-26 CPM2010-16 SDM2010-26 Link to ES Tech. Rep. Archives: ED2010-26 CPM2010-16 SDM2010-26 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
The LiMn2O4 films for Li secondary batteries have been prepared by a RF magnetron sputtering method. This research was designed for investigating the deposition condition of the films. The parameters were sputtering time, RF power, sputtering pressure and sputtering atmosphere. The LiMn2O4 films were deposited on the Al substrates. Afterwards the film properties were evaluated by X-ray diffraction. The film thickness was estimated by the gravimetry method. It was shown that the film thickness and the deposition rate were proportional to the sputtering time and the RF power and that they varied linearly with the sputtering pressure and the sputtering atmosphere. It was seemed that an optimum preparation could be obtained through this study. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
LiMn2O4 thin film / RF magnetron sputtering / Li secondary batteries / / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 110, no. 31, SDM2010-26, pp. 51-55, May 2010. |
Paper # |
SDM2010-26 |
Date of Issue |
2010-05-06 (ED, CPM, SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
ED2010-26 CPM2010-16 SDM2010-26 Link to ES Tech. Rep. Archives: ED2010-26 CPM2010-16 SDM2010-26 |
Conference Information |
Committee |
SDM CPM ED |
Conference Date |
2010-05-13 - 2010-05-14 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Shizuoka University (Hamamatsu Campus) |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Crystal growth, evaluation and device (Compound, Si, SiGe, Electronic and light emitting materials) |
Paper Information |
Registration To |
SDM |
Conference Code |
2010-05-SDM-CPM-ED |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Investigation of deposition condition of LiMn2O4 films prepared by RF magnetron sputtering |
Sub Title (in English) |
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Keyword(1) |
LiMn2O4 thin film |
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RF magnetron sputtering |
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Li secondary batteries |
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1st Author's Name |
Mitsuhiro Nakamura |
1st Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
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Masaaki Isai |
2nd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
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Speaker |
Author-1 |
Date Time |
2010-05-14 10:25:00 |
Presentation Time |
25 minutes |
Registration for |
SDM |
Paper # |
ED2010-26, CPM2010-16, SDM2010-26 |
Volume (vol) |
vol.110 |
Number (no) |
no.29(ED), no.30(CPM), no.31(SDM) |
Page |
pp.51-55 |
#Pages |
5 |
Date of Issue |
2010-05-06 (ED, CPM, SDM) |
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