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| Presentation | 2010-05-14 11:55 Study of Large Area CdTe X-ray and γ-ray Imaging Detectors Grown by MOVPE -- Study of growth condition for high quality CdTe/Si layer -- Tatsuhiko Goto, Kitau Egawa, Hirohisa Ogawa, Hisato Doyoshita, Hiroyuki Fukuta, Hiroaki Inuzuka, Tadahiro Tachi, Naoya Fujimura, Yasunori Agata, Madan Niraula, Kazuhito Yasuda (Nagoya Inst. Of Tech.)  ED2010-29 CPM2010-19 SDM2010-29 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | We are studying MOVPE growth of thick CdTe layers on Si substrates for x-ray, gamma ray detector development. The grown layers occasionally exhibited poor uniformity in electrical property and also partial peeling. In order to avoid this problem, we reexamined Si substrates pre-treatment conditions, which are carried in a separate chamber by heating them together with a GaAs substrate in a hydrogen environment. CdTe layers with good uniformity and substrate adhesion were obtained with this improved substrate pre-treatment condition. This was confirmed by successfully fabricating a p-CdTe/n-CdTe/n+-Si detector array by dicing the CdTe layers in a 1.5mm pitch. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | MOVPE / GaAs / CdTe on Si substrate / Array / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 110, no. 29, ED2010-29, pp. 65-68, May 2010. | |
| Paper # | ED2010-29 | |
| Date of Issue | 2010-05-06 (ED, CPM, SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2010-29 CPM2010-19 SDM2010-29 |
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| Conference Information | |
| Committee | SDM CPM ED |
| Conference Date | 2010-05-13 - 2010-05-14 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Shizuoka University (Hamamatsu Campus) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Crystal growth, evaluation and device (Compound, Si, SiGe, Electronic and light emitting materials） |
| Paper Information | |
| Registration To | ED |
| Conference Code | 2010-05-SDM-CPM-ED |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study of Large Area CdTe X-ray and γ-ray Imaging Detectors Grown by MOVPE |
| Sub Title (in English) | Study of growth condition for high quality CdTe/Si layer |
| Keyword(1) | MOVPE |
| Keyword(2) | GaAs |
| Keyword(3) | CdTe on Si substrate |
| Keyword(4) | Array |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Tatsuhiko Goto |
| 1st Author's Affiliation | Nagoya Institute Of Technology (Nagoya Inst. Of Tech.) |
| 2nd Author's Name | Kitau Egawa |
| 2nd Author's Affiliation | Nagoya Institute Of Technology (Nagoya Inst. Of Tech.) |
| 3rd Author's Name | Hirohisa Ogawa |
| 3rd Author's Affiliation | Nagoya Institute Of Technology (Nagoya Inst. Of Tech.) |
| 4th Author's Name | Hisato Doyoshita |
| 4th Author's Affiliation | Nagoya Institute Of Technology (Nagoya Inst. Of Tech.) |
| 5th Author's Name | Hiroyuki Fukuta |
| 5th Author's Affiliation | Nagoya Institute Of Technology (Nagoya Inst. Of Tech.) |
| 6th Author's Name | Hiroaki Inuzuka |
| 6th Author's Affiliation | Nagoya Institute Of Technology (Nagoya Inst. Of Tech.) |
| 7th Author's Name | Tadahiro Tachi |
| 7th Author's Affiliation | Nagoya Institute Of Technology (Nagoya Inst. Of Tech.) |
| 8th Author's Name | Naoya Fujimura |
| 8th Author's Affiliation | Nagoya Institute Of Technology (Nagoya Inst. Of Tech.) |
| 9th Author's Name | Yasunori Agata |
| 9th Author's Affiliation | Nagoya Institute Of Technology (Nagoya Inst. Of Tech.) |
| 10th Author's Name | Madan Niraula |
| 10th Author's Affiliation | Nagoya Institute Of Technology (Nagoya Inst. Of Tech.) |
| 11th Author's Name | Kazuhito Yasuda |
| 11th Author's Affiliation | Nagoya Institute Of Technology (Nagoya Inst. Of Tech.) |
| Speaker | Author-1 |
| Date Time | 2010-05-14 11:55:00 |
| Presentation Time | 25 minutes |
| Registration for | ED |
| Paper # | ED2010-29, CPM2010-19, SDM2010-29 |
| Volume (vol) | vol.110 |
| Number (no) | no.29(ED), no.30(CPM), no.31(SDM) |
| Page | pp.65-68 |
| #Pages | 4 |
| Date of Issue | 2010-05-06 (ED, CPM, SDM) |
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