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Paper Abstract and Keywords
Presentation 2010-09-29 15:15
Study of Correlation between SiO2 Film Properties and Temperature Coefficients of Frequency in SAW Devices with SiO2/LiNbO3 Structure
Satoru Matsuda, Michio Miura, Takashi Matsuda, Masanori Ueda, Yoshio Satoh (TAIYO YUDEN CO.,LTD.), Ken-ya Hashimoto (Grad. School of Eng., Chiba Univ.) US2010-53
Abstract (in Japanese) (See Japanese page) 
(in English) In the temperature compensation SAW device with SiO2/LiNbO3 structure, SiO2 film properties (the peak width at half maximum) and frequency temperature coefficient (TCF) was found to be correlated from the evaluation of SiO2 film properties using FT-IR (Fourier-transform Infrared Spectroscopy). As a result, we could find the index of improving the TCF and achieve TCF = 0 with the SiO2 thickness 0.3λ. We also explained the change of the elastic constants from the Si-O-Si bridging bond angle and understood the way of the improvement of TCF.
Keyword (in Japanese) (See Japanese page) 
(in English) SiO2 / LiNbO3 / temperature compensation / SAW / TCF / FT-IR / elastic constant / crystallinity  
Reference Info. IEICE Tech. Rep., vol. 110, no. 213, US2010-53, pp. 29-32, Sept. 2010.
Paper # US2010-53 
Date of Issue 2010-09-22 (US) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee US  
Conference Date 2010-09-29 - 2010-09-30 
Place (in Japanese) (See Japanese page) 
Place (in English) Tohoku Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) General 
Paper Information
Registration To US 
Conference Code 2010-09-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Study of Correlation between SiO2 Film Properties and Temperature Coefficients of Frequency in SAW Devices with SiO2/LiNbO3 Structure 
Sub Title (in English)  
Keyword(1) SiO2  
Keyword(2) LiNbO3  
Keyword(3) temperature compensation  
Keyword(4) SAW  
Keyword(5) TCF  
Keyword(6) FT-IR  
Keyword(7) elastic constant  
Keyword(8) crystallinity  
1st Author's Name Satoru Matsuda  
1st Author's Affiliation TAIYO YUDEN CO.,LTD. (TAIYO YUDEN CO.,LTD.)
2nd Author's Name Michio Miura  
2nd Author's Affiliation TAIYO YUDEN CO.,LTD. (TAIYO YUDEN CO.,LTD.)
3rd Author's Name Takashi Matsuda  
3rd Author's Affiliation TAIYO YUDEN CO.,LTD. (TAIYO YUDEN CO.,LTD.)
4th Author's Name Masanori Ueda  
4th Author's Affiliation TAIYO YUDEN CO.,LTD. (TAIYO YUDEN CO.,LTD.)
5th Author's Name Yoshio Satoh  
5th Author's Affiliation TAIYO YUDEN CO.,LTD. (TAIYO YUDEN CO.,LTD.)
6th Author's Name Ken-ya Hashimoto  
6th Author's Affiliation Graduate School of Engineering Chiba University (Grad. School of Eng., Chiba Univ.)
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Speaker Author-1 
Date Time 2010-09-29 15:15:00 
Presentation Time 25 minutes 
Registration for US 
Paper # US2010-53 
Volume (vol) vol.110 
Number (no) no.213 
Page pp.29-32 
#Pages 4 
Date of Issue 2010-09-22 (US) 

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