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Paper Abstract and Keywords
Presentation 2010-10-22 15:40
Patterning of source-drain electrodes for organic thin film transistors by softlithography
Yusuke Ura, Eiji Itoh (Shinshu Univ.) OME2010-52 Link to ES Tech. Rep. Archives: OME2010-52
Abstract (in Japanese) (See Japanese page) 
(in English) We have investigated the condition of direct patterning of sorce-drain(S-D) electrodes of fullerene (C60) thin
film transistors (TFTs) by soft-lithography technique. The transfer printing of Au electrodes was essentially difficult due to the
large surface energy of Au compared with those of stamper and C60. We, therefore, inserted the adhesion layer between Au and
C60 and/or the sacrifice layer between the stamper and Au, respectively. By conditioning the aspect ratio, stamper material,
transfer condition, etc., the fine patterns with the high resolution of 1μm were successfully patterned directly onto C60 layers.
We then fabricated the top-contact (TC) C60 TFT with the S-D electrodes patterned by the softlithography technique. The
saturated electron mobility of 0.26cm2/Vs and the threshold voltage of +20V was obtained with this technique and the
performance was comparable to the conventional TC-TFTs with Au as a S-D electrodes.
Keyword (in Japanese) (See Japanese page) 
(in English) softlithography / microfabrication / fullerene / Au-electrode / self-assembled monolayer / organic thin film transistor / /  
Reference Info. IEICE Tech. Rep., vol. 110, no. 243, OME2010-52, pp. 33-36, Oct. 2010.
Paper # OME2010-52 
Date of Issue 2010-10-15 (OME) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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Download PDF OME2010-52 Link to ES Tech. Rep. Archives: OME2010-52

Conference Information
Committee OME  
Conference Date 2010-10-22 - 2010-10-22 
Place (in Japanese) (See Japanese page) 
Place (in English) NTT Musashino R&D Center 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Organic Devices, etc 
Paper Information
Registration To OME 
Conference Code 2010-10-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Patterning of source-drain electrodes for organic thin film transistors by softlithography 
Sub Title (in English)  
Keyword(1) softlithography  
Keyword(2) microfabrication  
Keyword(3) fullerene  
Keyword(4) Au-electrode  
Keyword(5) self-assembled monolayer  
Keyword(6) organic thin film transistor  
Keyword(7)  
Keyword(8)  
1st Author's Name Yusuke Ura  
1st Author's Affiliation Shinshu University (Shinshu Univ.)
2nd Author's Name Eiji Itoh  
2nd Author's Affiliation Shinshu University (Shinshu Univ.)
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Speaker Author-1 
Date Time 2010-10-22 15:40:00 
Presentation Time 25 minutes 
Registration for OME 
Paper # OME2010-52 
Volume (vol) vol.110 
Number (no) no.243 
Page pp.33-36 
#Pages
Date of Issue 2010-10-15 (OME) 


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