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| Presentation | 2010-10-22 15:20 Development of Automated System of Ultra-Accelerated Quantum Chemical Molecular Dynamics Method and Its Application to Silicon/Insulator Interface Formation Technologies Hideyuki Tsuboi, Kenji Inaba, Mariko Ise, Yukie Hayashi, Yuka Suzuki, Hiromi Sato, Yukiko Obara, Ryo Nagumo, Ryuji Miura, Ai Suzuki, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Akira Miyamoto (Tohoku Univ.)  SDM2010-168 Link to ES Tech. Rep. Archives: SDM2010-168 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | The automated system of ultra-accelerated quantum chemical molecular dynamics method (UA-QCMD) has been developed. The new UA-QCMD simulator consisted of continuous combination of the following two parts. The first part consists of our original tight-binding quantum chemical simulator “Colors” and the second part is also our classical molecular dynamics simulator “NEW- RYUDO”. We have investigated the initial oxidation process for silicon/insulator interface. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Ultra accelerated quantum chemical molecular dynamics method / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 110, no. 241, SDM2010-168, pp. 67-68, Oct. 2010. | |
| Paper # | SDM2010-168 | |
| Date of Issue | 2010-10-14 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2010-168 Link to ES Tech. Rep. Archives: SDM2010-168 |
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| Conference Information | |
| Committee | SDM |
| Conference Date | 2010-10-21 - 2010-10-22 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Tohoku University |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Semiconductor process science and new technology |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2010-10-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Automated System of Ultra-Accelerated Quantum Chemical Molecular Dynamics Method and Its Application to Silicon/Insulator Interface Formation Technologies |
| Sub Title (in English) | |
| Keyword(1) | Ultra accelerated quantum chemical molecular dynamics method |
| Keyword(2) | |
| Keyword(3) | |
| Keyword(4) | |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Hideyuki Tsuboi |
| 1st Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 2nd Author's Name | Kenji Inaba |
| 2nd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 3rd Author's Name | Mariko Ise |
| 3rd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 4th Author's Name | Yukie Hayashi |
| 4th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 5th Author's Name | Yuka Suzuki |
| 5th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 6th Author's Name | Hiromi Sato |
| 6th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 7th Author's Name | Yukiko Obara |
| 7th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 8th Author's Name | Ryo Nagumo |
| 8th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 9th Author's Name | Ryuji Miura |
| 9th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 10th Author's Name | Ai Suzuki |
| 10th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 11th Author's Name | Nozomu Hatakeyama |
| 11th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 12th Author's Name | Akira Endou |
| 12th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 13th Author's Name | Hiromitsu Takaba |
| 13th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 14th Author's Name | Momoji Kubo |
| 14th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 15th Author's Name | Akira Miyamoto |
| 15th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2010-10-22 15:20:00 |
| Presentation Time | 30 minutes |
| Registration for | SDM |
| Paper # | SDM2010-168 |
| Volume (vol) | vol.110 |
| Number (no) | no.241 |
| Page | pp.67-68 |
| #Pages | 2 |
| Date of Issue | 2010-10-14 (SDM) |
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