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Paper Abstract and Keywords
Presentation 2010-12-10 10:45
Fundamental study of crystalline orientation control by collimated sputtering
Naoki Honda, Akito Honda (Tohoku Inst. Tech.) MR2010-51
Abstract (in Japanese) (See Japanese page) 
(in English) Fundamental investigation was performed for crystalline orientation control by collimated sputtering with the purpose of obtaining inclined anisotropy media. Enhancement effect of crystalline orientation by the collimator was observed for perpendicular orientation of hcp c-axis of Co-Cr alloy and Ru films. However, only small inclined angles of less than 2 degrees were obtained with inclined deposition using inclined collimators though the collimator angle was increased as large as 45 degrees. Further detailed study is required to obtain an inclined orientation film.
Keyword (in Japanese) (See Japanese page) 
(in English) Collimated sputtering / Inclined deposition / Crystalline orientation / Magnetic recording media / Co-Cr alloy / / /  
Reference Info. IEICE Tech. Rep., vol. 110, Dec. 2010.
Paper #  
Date of Issue 2010-12-02 (MR) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF MR2010-51

Conference Information
Committee ITE-MMS MRIS  
Conference Date 2010-12-09 - 2010-12-10 
Place (in Japanese) (See Japanese page) 
Place (in English) Ehime Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To MRIS 
Conference Code 2010-12-MMS-MR 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fundamental study of crystalline orientation control by collimated sputtering 
Sub Title (in English)  
Keyword(1) Collimated sputtering  
Keyword(2) Inclined deposition  
Keyword(3) Crystalline orientation  
Keyword(4) Magnetic recording media  
Keyword(5) Co-Cr alloy  
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Keyword(8)  
1st Author's Name Naoki Honda  
1st Author's Affiliation Tohoku Institute of Technology (Tohoku Inst. Tech.)
2nd Author's Name Akito Honda  
2nd Author's Affiliation Tohoku Institute of Technology (Tohoku Inst. Tech.)
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Speaker Author-1 
Date Time 2010-12-10 10:45:00 
Presentation Time 30 minutes 
Registration for MRIS 
Paper # MR2010-51 
Volume (vol) vol.110 
Number (no) no.329 
Page pp.65-72 
#Pages 8 
Date of Issue 2010-12-02 (MR) 

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