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| Presentation | 2010-12-17 13:05 Development of integration technology of silicon MZI modulator and InGaAs MSM-PD for on-chip optical interconnects. Kazuya Ohira, Kentaro Kobayashi, Norio Iizuka, Haruhiko Yoshida, Takashi Suzuki, Nobuo Suzuki, Mizunori Ezaki (Toshiba)  OPE2010-131 Link to ES Tech. Rep. Archives: OPE2010-131 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | The development of integration technology of silicon MZI modulator and InGaAs MSM-PD for on-chip optical interconnects are reported. We demonstrated a silicon Mach-Zehnder interferometer (MZI) optical modulator, operated with carrier-injection mode, with a short device length of less than 100$\mu$m and high-modulation efficiency （VL=0.06Vmm）, and InGaAs MSM-PDs integrated on Si waveguide with a small footprint of 2 × 10 $\mu$m^2, high-efficiency (0.94 A/W), low dark current (less than 20 nA), and a capability of 10 Gbps data rate. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Optical interconnects / Si waveguide / Silicon photonics / Optical modulator / Photodetector / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 110, no. 352, OPE2010-131, pp. 1-6, Dec. 2010. | |
| Paper # | OPE2010-131 | |
| Date of Issue | 2010-12-10 (OPE) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | OPE2010-131 Link to ES Tech. Rep. Archives: OPE2010-131 |
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| Conference Information | |
| Committee | OPE |
| Conference Date | 2010-12-17 - 2010-12-17 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | OPE |
| Conference Code | 2010-12-OPE |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of integration technology of silicon MZI modulator and InGaAs MSM-PD for on-chip optical interconnects. |
| Sub Title (in English) | |
| Keyword(1) | Optical interconnects |
| Keyword(2) | Si waveguide |
| Keyword(3) | Silicon photonics |
| Keyword(4) | Optical modulator |
| Keyword(5) | Photodetector |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Kazuya Ohira |
| 1st Author's Affiliation | Toshiba Corporation (Toshiba) |
| 2nd Author's Name | Kentaro Kobayashi |
| 2nd Author's Affiliation | Toshiba Corporation (Toshiba) |
| 3rd Author's Name | Norio Iizuka |
| 3rd Author's Affiliation | Toshiba Corporation (Toshiba) |
| 4th Author's Name | Haruhiko Yoshida |
| 4th Author's Affiliation | Toshiba Corporation (Toshiba) |
| 5th Author's Name | Takashi Suzuki |
| 5th Author's Affiliation | Toshiba Corporation (Toshiba) |
| 6th Author's Name | Nobuo Suzuki |
| 6th Author's Affiliation | Toshiba Corporation (Toshiba) |
| 7th Author's Name | Mizunori Ezaki |
| 7th Author's Affiliation | Toshiba Corporation (Toshiba) |
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| Speaker | Author-1 |
| Date Time | 2010-12-17 13:05:00 |
| Presentation Time | 25 minutes |
| Registration for | OPE |
| Paper # | OPE2010-131 |
| Volume (vol) | vol.110 |
| Number (no) | no.352 |
| Page | pp.1-6 |
| #Pages | 6 |
| Date of Issue | 2010-12-10 (OPE) |
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