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Paper Abstract and Keywords
Presentation 2011-02-07 13:50
Application of Quartz Crystal Microbalance with Organic Thin Films prepared by Spin coat and RF Sputtering for Active Oxygen Monitoring
Hiroyuki Matsumoto, Kiyoshi Yoshino, Tatsuyuki Iwasaki, Shinobu Kinoshita (Iwasaki Electric), Kazutoshi Noda (AIST), Wataru Arai, Satoru Iwamori (Tokai Univ.) OME2010-70
Abstract (in Japanese) (See Japanese page) 
(in English) To investigate potential as an active oxygen monitor, fluorocarbon polymers prepared by a spin coating and RF sputtering with PTFE target on the quartz crystal substrate were evaluated as the QCM sensor. Active oxygen generated under the low pressure mercury lamp was monitored by each sensor, and its detection sensitivities were estimated. As a result, it was confirmed that there is great difference for mass loss of organic thin film, e.g., film etching characteristic between them. In this study, to clarify molecular structures of these organic thin films, FT-IR analyses were also performed.
Keyword (in Japanese) (See Japanese page) 
(in English) active oxygen / quartz crystal microbalance(QCM) / organic thin film / spin coating / RF sputtering / / /  
Reference Info. IEICE Tech. Rep., vol. 110, no. 409, OME2010-70, pp. 11-14, Feb. 2011.
Paper # OME2010-70 
Date of Issue 2011-01-31 (OME) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee OME  
Conference Date 2011-02-07 - 2011-02-07 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Sensors, Devices, etc. 
Paper Information
Registration To OME 
Conference Code 2011-02-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Application of Quartz Crystal Microbalance with Organic Thin Films prepared by Spin coat and RF Sputtering for Active Oxygen Monitoring 
Sub Title (in English)  
Keyword(1) active oxygen  
Keyword(2) quartz crystal microbalance(QCM)  
Keyword(3) organic thin film  
Keyword(4) spin coating  
Keyword(5) RF sputtering  
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Keyword(7)  
Keyword(8)  
1st Author's Name Hiroyuki Matsumoto  
1st Author's Affiliation Iwasaki Electric Co.,Ltd (Iwasaki Electric)
2nd Author's Name Kiyoshi Yoshino  
2nd Author's Affiliation Iwasaki Electric Co.,Ltd (Iwasaki Electric)
3rd Author's Name Tatsuyuki Iwasaki  
3rd Author's Affiliation Iwasaki Electric Co.,Ltd (Iwasaki Electric)
4th Author's Name Shinobu Kinoshita  
4th Author's Affiliation Iwasaki Electric Co.,Ltd (Iwasaki Electric)
5th Author's Name Kazutoshi Noda  
5th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
6th Author's Name Wataru Arai  
6th Author's Affiliation Tokai University (Tokai Univ.)
7th Author's Name Satoru Iwamori  
7th Author's Affiliation Tokai University (Tokai Univ.)
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Speaker Author-1 
Date Time 2011-02-07 13:50:00 
Presentation Time 25 minutes 
Registration for OME 
Paper # OME2010-70 
Volume (vol) vol.110 
Number (no) no.409 
Page pp.11-14 
#Pages 4 
Date of Issue 2011-01-31 (OME) 

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