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| Presentation | 2011-02-07 13:50 Application of Quartz Crystal Microbalance with Organic Thin Films prepared by Spin coat and RF Sputtering for Active Oxygen Monitoring Hiroyuki Matsumoto, Kiyoshi Yoshino, Tatsuyuki Iwasaki, Shinobu Kinoshita (Iwasaki Electric), Kazutoshi Noda (AIST), Wataru Arai, Satoru Iwamori (Tokai Univ.)  OME2010-70 Link to ES Tech. Rep. Archives: OME2010-70 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | To investigate potential as an active oxygen monitor, fluorocarbon polymers prepared by a spin coating and RF sputtering with PTFE target on the quartz crystal substrate were evaluated as the QCM sensor. Active oxygen generated under the low pressure mercury lamp was monitored by each sensor, and its detection sensitivities were estimated. As a result, it was confirmed that there is great difference for mass loss of organic thin film, e.g., film etching characteristic between them. In this study, to clarify molecular structures of these organic thin films, FT-IR analyses were also performed. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | active oxygen / quartz crystal microbalance(QCM) / organic thin film / spin coating / RF sputtering / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 110, no. 409, OME2010-70, pp. 11-14, Feb. 2011. | |
| Paper # | OME2010-70 | |
| Date of Issue | 2011-01-31 (OME) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | OME2010-70 Link to ES Tech. Rep. Archives: OME2010-70 |
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| Conference Information | |
| Committee | OME |
| Conference Date | 2011-02-07 - 2011-02-07 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Sensors, Devices, etc. |
| Paper Information | |
| Registration To | OME |
| Conference Code | 2011-02-OME |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Application of Quartz Crystal Microbalance with Organic Thin Films prepared by Spin coat and RF Sputtering for Active Oxygen Monitoring |
| Sub Title (in English) | |
| Keyword(1) | active oxygen |
| Keyword(2) | quartz crystal microbalance(QCM) |
| Keyword(3) | organic thin film |
| Keyword(4) | spin coating |
| Keyword(5) | RF sputtering |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Hiroyuki Matsumoto |
| 1st Author's Affiliation | Iwasaki Electric Co.,Ltd (Iwasaki Electric) |
| 2nd Author's Name | Kiyoshi Yoshino |
| 2nd Author's Affiliation | Iwasaki Electric Co.,Ltd (Iwasaki Electric) |
| 3rd Author's Name | Tatsuyuki Iwasaki |
| 3rd Author's Affiliation | Iwasaki Electric Co.,Ltd (Iwasaki Electric) |
| 4th Author's Name | Shinobu Kinoshita |
| 4th Author's Affiliation | Iwasaki Electric Co.,Ltd (Iwasaki Electric) |
| 5th Author's Name | Kazutoshi Noda |
| 5th Author's Affiliation | National Institute of Advanced Industrial Science and Technology (AIST) |
| 6th Author's Name | Wataru Arai |
| 6th Author's Affiliation | Tokai University (Tokai Univ.) |
| 7th Author's Name | Satoru Iwamori |
| 7th Author's Affiliation | Tokai University (Tokai Univ.) |
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| Speaker | Author-1 |
| Date Time | 2011-02-07 13:50:00 |
| Presentation Time | 25 minutes |
| Registration for | OME |
| Paper # | OME2010-70 |
| Volume (vol) | vol.110 |
| Number (no) | no.409 |
| Page | pp.11-14 |
| #Pages | 4 |
| Date of Issue | 2011-01-31 (OME) |
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