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Paper Abstract and Keywords
Presentation 2011-05-20 13:25
Preparation and evaluation of Ga2O3 ovygen sensors
Takahiro Yamamoto, Shinya Kayano, Hiroki Ikeda, Yoshifumi Suzuki, Masaaki Isai (Shizuoka Univ.) ED2011-27 CPM2011-34 SDM2011-40 Link to ES Tech. Rep. Archives: ED2011-27 CPM2011-34 SDM2011-40
Abstract (in Japanese) (See Japanese page) 
(in English) Recently, from a point of environmental problems, oxygen gas sensors attract attention of controlling the exhaust gas. The Ga2O3 has an oxygen detection characteristic at more than 900℃, so this material attracts much attention as an oxygen sensor at high temperature. The β-Ga2O3 films were prepared by the RF magnetron sputtering method. On two kinds of substrates namely Si (100) and quartz to compare and examined the influence on the oxygen detection characteristics. As a result, it was found that the oxygen gas sensor fabricated on a quartz substrate had superior oxygen detection characteristics.
Keyword (in Japanese) (See Japanese page) 
(in English) Gallium oxide / Metal oxides / Magnetron sputtering method / Rapid thermal annealing(RTA) / Oxygen sensor / / /  
Reference Info. IEICE Tech. Rep., vol. 111, no. 45, CPM2011-34, pp. 135-138, May 2011.
Paper # CPM2011-34 
Date of Issue 2011-05-12 (ED, CPM, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2011-27 CPM2011-34 SDM2011-40 Link to ES Tech. Rep. Archives: ED2011-27 CPM2011-34 SDM2011-40

Conference Information
Committee CPM SDM ED  
Conference Date 2011-05-19 - 2011-05-20 
Place (in Japanese) (See Japanese page) 
Place (in English) Nagoya Univ. (VBL) 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To CPM 
Conference Code 2011-05-CPM-SDM-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Preparation and evaluation of Ga2O3 ovygen sensors 
Sub Title (in English)  
Keyword(1) Gallium oxide  
Keyword(2) Metal oxides  
Keyword(3) Magnetron sputtering method  
Keyword(4) Rapid thermal annealing(RTA)  
Keyword(5) Oxygen sensor  
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1st Author's Name Takahiro Yamamoto  
1st Author's Affiliation Shizuoka University (Shizuoka Univ.)
2nd Author's Name Shinya Kayano  
2nd Author's Affiliation Shizuoka University (Shizuoka Univ.)
3rd Author's Name Hiroki Ikeda  
3rd Author's Affiliation Shizuoka University (Shizuoka Univ.)
4th Author's Name Yoshifumi Suzuki  
4th Author's Affiliation Shizuoka University (Shizuoka Univ.)
5th Author's Name Masaaki Isai  
5th Author's Affiliation Shizuoka University (Shizuoka Univ.)
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Speaker Author-1 
Date Time 2011-05-20 13:25:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # ED2011-27, CPM2011-34, SDM2011-40 
Volume (vol) vol.111 
Number (no) no.44(ED), no.45(CPM), no.46(SDM) 
Page pp.135-138 
#Pages
Date of Issue 2011-05-12 (ED, CPM, SDM) 


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