Paper Abstract and Keywords |
Presentation |
2011-05-20 13:25
Preparation and evaluation of Ga2O3 ovygen sensors Takahiro Yamamoto, Shinya Kayano, Hiroki Ikeda, Yoshifumi Suzuki, Masaaki Isai (Shizuoka Univ.) ED2011-27 CPM2011-34 SDM2011-40 Link to ES Tech. Rep. Archives: ED2011-27 CPM2011-34 SDM2011-40 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Recently, from a point of environmental problems, oxygen gas sensors attract attention of controlling the exhaust gas. The Ga2O3 has an oxygen detection characteristic at more than 900℃, so this material attracts much attention as an oxygen sensor at high temperature. The β-Ga2O3 films were prepared by the RF magnetron sputtering method. On two kinds of substrates namely Si (100) and quartz to compare and examined the influence on the oxygen detection characteristics. As a result, it was found that the oxygen gas sensor fabricated on a quartz substrate had superior oxygen detection characteristics. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Gallium oxide / Metal oxides / Magnetron sputtering method / Rapid thermal annealing(RTA) / Oxygen sensor / / / |
Reference Info. |
IEICE Tech. Rep., vol. 111, no. 45, CPM2011-34, pp. 135-138, May 2011. |
Paper # |
CPM2011-34 |
Date of Issue |
2011-05-12 (ED, CPM, SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
ED2011-27 CPM2011-34 SDM2011-40 Link to ES Tech. Rep. Archives: ED2011-27 CPM2011-34 SDM2011-40 |
Conference Information |
Committee |
CPM SDM ED |
Conference Date |
2011-05-19 - 2011-05-20 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Nagoya Univ. (VBL) |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
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Paper Information |
Registration To |
CPM |
Conference Code |
2011-05-CPM-SDM-ED |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Preparation and evaluation of Ga2O3 ovygen sensors |
Sub Title (in English) |
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Keyword(1) |
Gallium oxide |
Keyword(2) |
Metal oxides |
Keyword(3) |
Magnetron sputtering method |
Keyword(4) |
Rapid thermal annealing(RTA) |
Keyword(5) |
Oxygen sensor |
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1st Author's Name |
Takahiro Yamamoto |
1st Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
2nd Author's Name |
Shinya Kayano |
2nd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
3rd Author's Name |
Hiroki Ikeda |
3rd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
4th Author's Name |
Yoshifumi Suzuki |
4th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
5th Author's Name |
Masaaki Isai |
5th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
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Speaker |
Author-1 |
Date Time |
2011-05-20 13:25:00 |
Presentation Time |
25 minutes |
Registration for |
CPM |
Paper # |
ED2011-27, CPM2011-34, SDM2011-40 |
Volume (vol) |
vol.111 |
Number (no) |
no.44(ED), no.45(CPM), no.46(SDM) |
Page |
pp.135-138 |
#Pages |
4 |
Date of Issue |
2011-05-12 (ED, CPM, SDM) |
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