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| Presentation | 2011-10-20 16:45 Study on the electron gun for Micro-Column Electron Beam Takahiro Fujino, Akifumi Koike (RIE Shizuoka Univ), Masayoshi Nagao, Tomoya Yoshida, Takashi Nishi (AIST), Hidekazu Murata, Kentaro Sakai (Meijo Univ), Yoichiro Neo, Toru Aoki, Hidenori Mimura (RIE Shizuoka Univ)  ED2011-65 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Our final goal is to fabricate truly meaning micro-column, that consists of micro-sized field emitter and electro optics lens by using semiconductor processes. When micro-columns could be integrated with high density, their finely focused multi-beams can also be realized. It has highly potential for maskless lithography (ML2). It was already reported that the previous micro-column with 5 stacked gate electrodes made a certain crossover less than 40 m in diameter. However, to reduce beam spot, the specification for electron gun was realized. After estimating from electron orbit simulation，it was cleared the following conditions, electron beam must be accelerated less than 10 eV and its diameter must be less than 300nm. The electron beam should be parallel, and so on.This report described about optimal structure of electron gun and its electron emission and optical properties. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Micro-column / Multi-beam / Maskless lithography / West electrode / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 111, no. 248, ED2011-65, pp. 27-32, Oct. 2011. | |
| Paper # | ED2011-65 | |
| Date of Issue | 2011-10-13 (ED) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2011-65 |
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| Conference Information | |
| Committee | ED |
| Conference Date | 2011-10-20 - 2011-10-21 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | ED |
| Conference Code | 2011-10-ED |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study on the electron gun for Micro-Column Electron Beam |
| Sub Title (in English) | |
| Keyword(1) | Micro-column |
| Keyword(2) | Multi-beam |
| Keyword(3) | Maskless lithography |
| Keyword(4) | West electrode |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Takahiro Fujino |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka University (RIE Shizuoka Univ) |
| 2nd Author's Name | Akifumi Koike |
| 2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University (RIE Shizuoka Univ) |
| 3rd Author's Name | Masayoshi Nagao |
| 3rd Author's Affiliation | National Institute of Advanced Idustrial Science & Technology (AIST) |
| 4th Author's Name | Tomoya Yoshida |
| 4th Author's Affiliation | National Institute of Advanced Idustrial Science & Technology (AIST) |
| 5th Author's Name | Takashi Nishi |
| 5th Author's Affiliation | National Institute of Advanced Idustrial Science & Technology (AIST) |
| 6th Author's Name | Hidekazu Murata |
| 6th Author's Affiliation | Meijo University (Meijo Univ) |
| 7th Author's Name | Kentaro Sakai |
| 7th Author's Affiliation | Meijo University (Meijo Univ) |
| 8th Author's Name | Yoichiro Neo |
| 8th Author's Affiliation | Research Institute of Electronics, Shizuoka University (RIE Shizuoka Univ) |
| 9th Author's Name | Toru Aoki |
| 9th Author's Affiliation | Research Institute of Electronics, Shizuoka University (RIE Shizuoka Univ) |
| 10th Author's Name | Hidenori Mimura |
| 10th Author's Affiliation | Research Institute of Electronics, Shizuoka University (RIE Shizuoka Univ) |
| Speaker | Author-1 |
| Date Time | 2011-10-20 16:45:00 |
| Presentation Time | 25 minutes |
| Registration for | ED |
| Paper # | ED2011-65 |
| Volume (vol) | vol.111 |
| Number (no) | no.248 |
| Page | pp.27-32 |
| #Pages | 6 |
| Date of Issue | 2011-10-13 (ED) |
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