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Presentation 2011-10-20 16:45
Study on the electron gun for Micro-Column Electron Beam
Takahiro Fujino, Akifumi Koike (RIE Shizuoka Univ), Masayoshi Nagao, Tomoya Yoshida, Takashi Nishi (AIST), Hidekazu Murata, Kentaro Sakai (Meijo Univ), Yoichiro Neo, Toru Aoki, Hidenori Mimura (RIE Shizuoka Univ) ED2011-65 Link to ES Tech. Rep. Archives: ED2011-65
Abstract (in Japanese) (See Japanese page) 
(in English) Our final goal is to fabricate truly meaning micro-column, that consists of micro-sized field emitter and electro optics lens by using semiconductor processes. When micro-columns could be integrated with high density, their finely focused multi-beams can also be realized. It has highly potential for maskless lithography (ML2). It was already reported that the previous micro-column with 5 stacked gate electrodes made a certain crossover less than 40 m in diameter. However, to reduce beam spot, the specification for electron gun was realized. After estimating from electron orbit simulation,it was cleared the following conditions, electron beam must be accelerated less than 10 eV and its diameter must be less than 300nm. The electron beam should be parallel, and so on.This report described about optimal structure of electron gun and its electron emission and optical properties.
Keyword (in Japanese) (See Japanese page) 
(in English) Micro-column / Multi-beam / Maskless lithography / West electrode / / / /  
Reference Info. IEICE Tech. Rep., vol. 111, no. 248, ED2011-65, pp. 27-32, Oct. 2011.
Paper # ED2011-65 
Date of Issue 2011-10-13 (ED) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee ED  
Conference Date 2011-10-20 - 2011-10-21 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To ED 
Conference Code 2011-10-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Study on the electron gun for Micro-Column Electron Beam 
Sub Title (in English)  
Keyword(1) Micro-column  
Keyword(2) Multi-beam  
Keyword(3) Maskless lithography  
Keyword(4) West electrode  
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Keyword(6)  
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1st Author's Name Takahiro Fujino  
1st Author's Affiliation Research Institute of Electronics, Shizuoka University (RIE Shizuoka Univ)
2nd Author's Name Akifumi Koike  
2nd Author's Affiliation Research Institute of Electronics, Shizuoka University (RIE Shizuoka Univ)
3rd Author's Name Masayoshi Nagao  
3rd Author's Affiliation National Institute of Advanced Idustrial Science & Technology (AIST)
4th Author's Name Tomoya Yoshida  
4th Author's Affiliation National Institute of Advanced Idustrial Science & Technology (AIST)
5th Author's Name Takashi Nishi  
5th Author's Affiliation National Institute of Advanced Idustrial Science & Technology (AIST)
6th Author's Name Hidekazu Murata  
6th Author's Affiliation Meijo University (Meijo Univ)
7th Author's Name Kentaro Sakai  
7th Author's Affiliation Meijo University (Meijo Univ)
8th Author's Name Yoichiro Neo  
8th Author's Affiliation Research Institute of Electronics, Shizuoka University (RIE Shizuoka Univ)
9th Author's Name Toru Aoki  
9th Author's Affiliation Research Institute of Electronics, Shizuoka University (RIE Shizuoka Univ)
10th Author's Name Hidenori Mimura  
10th Author's Affiliation Research Institute of Electronics, Shizuoka University (RIE Shizuoka Univ)
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Speaker
Date Time 2011-10-20 16:45:00 
Presentation Time 25 
Registration for ED 
Paper # ED2011-65 
Volume (vol) 111 
Number (no) no.248 
Page pp.27-32 
#Pages
Date of Issue 2011-10-13 (ED) 


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