| Paper Abstract and Keywords |
| Presentation |
2011-10-27 10:45
MOVPE growth of InN using NH3 decomposition catalyst Dazio Hironaga, Kenichi Sugita, A.g. Bhuiyan, Akihiro Hashimoto, Akio Yamamoto (Univ.of Fukui) CPM2011-121 |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
In order to increase the NH3 decomposition rate in the MOVPE growth of InN, the employment of Pt catalyst has been proposed and experimentally demonstrated. Electrical and crystallographic properties of InN are markedly improved by using Pt catalyst. An electron mobility as high as 1340 cm2/Vs and a tilt fluctuation as low as 8.63 arcmin have been obtained for InN films grown with Pt catalyst. The improvements of electrical and crystallographic properties of InN with increasing grown InN thickness have been also found. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
MOVPE / InN / NH3 / / / / / |
| Reference Info. |
IEICE Tech. Rep., vol. 111, no. 264, CPM2011-121, pp. 59-62, Oct. 2011. |
| Paper # |
CPM2011-121 |
| Date of Issue |
2011-10-19 (CPM) |
| ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
| Download PDF |
CPM2011-121 |
| Conference Information |
| Committee |
CPM |
| Conference Date |
2011-10-26 - 2011-10-27 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Fukui Univ. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
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| Paper Information |
| Registration To |
CPM |
| Conference Code |
2011-10-CPM |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
MOVPE growth of InN using NH3 decomposition catalyst |
| Sub Title (in English) |
|
| Keyword(1) |
MOVPE |
| Keyword(2) |
InN |
| Keyword(3) |
NH3 |
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| 1st Author's Name |
Dazio Hironaga |
| 1st Author's Affiliation |
University of Fukui (Univ.of Fukui) |
| 2nd Author's Name |
Kenichi Sugita |
| 2nd Author's Affiliation |
University of Fukui (Univ.of Fukui) |
| 3rd Author's Name |
A.g. Bhuiyan |
| 3rd Author's Affiliation |
University of Fukui (Univ.of Fukui) |
| 4th Author's Name |
Akihiro Hashimoto |
| 4th Author's Affiliation |
University of Fukui (Univ.of Fukui) |
| 5th Author's Name |
Akio Yamamoto |
| 5th Author's Affiliation |
University of Fukui (Univ.of Fukui) |
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| Speaker |
Author-1 |
| Date Time |
2011-10-27 10:45:00 |
| Presentation Time |
25 minutes |
| Registration for |
CPM |
| Paper # |
CPM2011-121 |
| Volume (vol) |
vol.111 |
| Number (no) |
no.264 |
| Page |
pp.59-62 |
| #Pages |
4 |
| Date of Issue |
2011-10-19 (CPM) |