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Paper Abstract and Keywords
Presentation 2011-10-31 13:00
Resonance Properties of Surface Acoustic Wave Resonators in Supercritical CO2
Katsuhiro Hayashi, Shoji Kakio, Eiichi Kondoh (Univ. Yamanashi) US2011-58
Abstract (in Japanese) (See Japanese page) 
(in English) A supercritical fluid is a fluid at a temperature and pressure above its critical point. Supercritical CO2 functions as a moderate solvent, has zero surface tension, and has high permeability in fine structures. These properties are regarded as ideal for the processing of nano- and microscale substances, and research and development on the formation of such substances and processes have been carried out actively. A problem of applying supercritical fluids is the heterogeneity of their molecular distribution, i.e., fluctuations in their density. By utilizing a surface acoustic wave (SAW), it may be possible to realize a sensor for measuring the density fluctuation. In this study, the resonance property of a shear-horizontal-type SAW resonator fabricated on 36° YX-LiTaO3 substrate and the impedance of interdigitated electrode (IDE) fabricated on a nonpiezoelectric substrate were measured in high-pressure CO2. Abrupt changes in the resonance properties due to discontinuous changes in the density and viscosity were observed at a certain CO2 pressure. The IDE impedance change due to discontinuous changes in the permittivity was also observed.
Keyword (in Japanese) (See Japanese page) 
(in English) Supercritical CO2 / Fluctuations of density / SAW resonator / Shear-horizontal-type SAW / Interdigitated electrode / / /  
Reference Info. IEICE Tech. Rep., vol. 111, no. 272, US2011-58, pp. 1-6, Oct. 2011.
Paper # US2011-58 
Date of Issue 2011-10-24 (US) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF US2011-58

Conference Information
Committee US  
Conference Date 2011-10-31 - 2011-10-31 
Place (in Japanese) (See Japanese page) 
Place (in English) University of Yamanashi 
Topics (in Japanese) (See Japanese page) 
Topics (in English) General 
Paper Information
Registration To US 
Conference Code 2011-10-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Resonance Properties of Surface Acoustic Wave Resonators in Supercritical CO2 
Sub Title (in English)  
Keyword(1) Supercritical CO2  
Keyword(2) Fluctuations of density  
Keyword(3) SAW resonator  
Keyword(4) Shear-horizontal-type SAW  
Keyword(5) Interdigitated electrode  
Keyword(6)  
Keyword(7)  
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1st Author's Name Katsuhiro Hayashi  
1st Author's Affiliation University of Yamanashi (Univ. Yamanashi)
2nd Author's Name Shoji Kakio  
2nd Author's Affiliation University of Yamanashi (Univ. Yamanashi)
3rd Author's Name Eiichi Kondoh  
3rd Author's Affiliation University of Yamanashi (Univ. Yamanashi)
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Speaker Author-1 
Date Time 2011-10-31 13:00:00 
Presentation Time 25 minutes 
Registration for US 
Paper # US2011-58 
Volume (vol) vol.111 
Number (no) no.272 
Page pp.1-6 
#Pages 6 
Date of Issue 2011-10-24 (US) 

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